AU448310B2 - Improved metal-oxide-metal, thin-film capacitors and method of making same - Google Patents

Improved metal-oxide-metal, thin-film capacitors and method of making same

Info

Publication number
AU448310B2
AU448310B2 AU38727/72A AU3872772A AU448310B2 AU 448310 B2 AU448310 B2 AU 448310B2 AU 38727/72 A AU38727/72 A AU 38727/72A AU 3872772 A AU3872772 A AU 3872772A AU 448310 B2 AU448310 B2 AU 448310B2
Authority
AU
Australia
Prior art keywords
metal
oxide
thin
making same
film capacitors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU38727/72A
Other languages
English (en)
Other versions
AU3872772A (en
Inventor
Patrick Daly Francis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RCA Corp filed Critical RCA Corp
Publication of AU3872772A publication Critical patent/AU3872772A/en
Application granted granted Critical
Publication of AU448310B2 publication Critical patent/AU448310B2/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/002Details
    • H01G4/018Dielectrics
    • H01G4/06Solid dielectrics
    • H01G4/08Inorganic dielectrics
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/002Details
    • H01G4/018Dielectrics
    • H01G4/06Solid dielectrics
    • H01G4/08Inorganic dielectrics
    • H01G4/10Metal-oxide dielectrics
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/43Electric condenser making
    • Y10T29/435Solid dielectric type

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Semiconductor Integrated Circuits (AREA)
AU38727/72A 1971-02-09 1972-02-08 Improved metal-oxide-metal, thin-film capacitors and method of making same Expired AU448310B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11397371A 1971-02-09 1971-02-09

Publications (2)

Publication Number Publication Date
AU3872772A AU3872772A (en) 1973-08-09
AU448310B2 true AU448310B2 (en) 1974-04-19

Family

ID=22352616

Family Applications (1)

Application Number Title Priority Date Filing Date
AU38727/72A Expired AU448310B2 (en) 1971-02-09 1972-02-08 Improved metal-oxide-metal, thin-film capacitors and method of making same

Country Status (10)

Country Link
US (1) US3679942A (OSRAM)
JP (1) JPS5026142B1 (OSRAM)
AU (1) AU448310B2 (OSRAM)
BE (1) BE779056A (OSRAM)
CA (1) CA939028A (OSRAM)
DE (1) DE2204946A1 (OSRAM)
FR (1) FR2124292B1 (OSRAM)
GB (1) GB1338193A (OSRAM)
IT (1) IT947408B (OSRAM)
SE (1) SE362529B (OSRAM)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2818624C2 (de) * 1978-04-27 1987-03-12 Roederstein Spezialfabriken für Bauelemente der Elektronik und Kondensatoren der Starkstromtechnik GmbH, 8300 Landshut Verfahren zur Herstellung eines elektrischen Kondensators
FR2509516A1 (fr) * 1981-07-08 1983-01-14 Labo Electronique Physique Procede destine a accroitre la tension de claquage d'un condensateur integre et condensateur ainsi realise
US4453199A (en) * 1983-06-17 1984-06-05 Avx Corporation Low cost thin film capacitor
DE3442790A1 (de) * 1984-11-23 1986-06-05 Dieter Prof. Dr. Linz Bäuerle Verfahren zur herstellung von duennschichtkondensatoren
DE68906219T2 (de) * 1988-08-25 1993-08-05 Matsushita Electric Ind Co Ltd Duennfilmkapazitaet und verfahren zur herstellung einer integrierten hybridmikrowellenschaltung.
US6935002B1 (en) * 1997-10-13 2005-08-30 Murata Manufacturing Co., Ltd. Method of manufacturing a nonreciprocal circuit device
US6180462B1 (en) * 1999-06-07 2001-01-30 United Microelectronics Corp. Method of fabricating an analog integrated circuit with ESD protection
US6323078B1 (en) * 1999-10-14 2001-11-27 Agere Systems Guardian Corp. Method of forming metal oxide metal capacitors using multi-step rapid thermal process and a device formed thereby
KR100651724B1 (ko) * 2004-12-13 2006-12-01 한국전자통신연구원 수평 구조의 가변 축전기 및 이를 구비한 초고주파 가변소자
CN102385985A (zh) * 2011-08-05 2012-03-21 贵州大学 金属薄膜电容及其制备方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2734478A (en) * 1956-02-14 Copper
US2398176A (en) * 1943-03-15 1946-04-09 Du Pont Electrical capacitor
GB967746A (en) * 1960-11-08 1964-08-26 Nippon Electric Co Electrolytic capacitors
US3273033A (en) * 1963-08-29 1966-09-13 Litton Systems Inc Multidielectric thin film capacitors
US3397446A (en) * 1965-07-09 1968-08-20 Western Electric Co Thin film capacitors employing semiconductive oxide electrolytes

Also Published As

Publication number Publication date
BE779056A (fr) 1972-05-30
DE2204946A1 (de) 1972-08-24
AU3872772A (en) 1973-08-09
US3679942A (en) 1972-07-25
SE362529B (OSRAM) 1973-12-10
GB1338193A (en) 1973-11-21
IT947408B (it) 1973-05-21
FR2124292B1 (OSRAM) 1976-07-09
JPS5026142B1 (OSRAM) 1975-08-29
CA939028A (en) 1973-12-25
FR2124292A1 (OSRAM) 1972-09-22

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