AU4427800A - Micromachined displacement sensors and actuators - Google Patents

Micromachined displacement sensors and actuators

Info

Publication number
AU4427800A
AU4427800A AU44278/00A AU4427800A AU4427800A AU 4427800 A AU4427800 A AU 4427800A AU 44278/00 A AU44278/00 A AU 44278/00A AU 4427800 A AU4427800 A AU 4427800A AU 4427800 A AU4427800 A AU 4427800A
Authority
AU
Australia
Prior art keywords
micromachined
actuators
displacement sensors
sensors
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU44278/00A
Inventor
Dan Haronian
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ramot at Tel Aviv University Ltd
Original Assignee
Ramot at Tel Aviv University Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ramot at Tel Aviv University Ltd filed Critical Ramot at Tel Aviv University Ltd
Publication of AU4427800A publication Critical patent/AU4427800A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Gyroscopes (AREA)
AU44278/00A 1999-05-19 2000-05-10 Micromachined displacement sensors and actuators Abandoned AU4427800A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IL130045 1999-05-19
IL13004599A IL130045A0 (en) 1999-05-19 1999-05-19 Micromachined displacement sensors and actuators
PCT/IL2000/000268 WO2000071981A1 (en) 1999-05-19 2000-05-10 Micromachined displacement sensors and actuators

Publications (1)

Publication Number Publication Date
AU4427800A true AU4427800A (en) 2000-12-12

Family

ID=11072825

Family Applications (1)

Application Number Title Priority Date Filing Date
AU44278/00A Abandoned AU4427800A (en) 1999-05-19 2000-05-10 Micromachined displacement sensors and actuators

Country Status (3)

Country Link
AU (1) AU4427800A (en)
IL (1) IL130045A0 (en)
WO (1) WO2000071981A1 (en)

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US7554578B2 (en) 2000-07-11 2009-06-30 Phase One A/S Digital camera with integrated accelerometers
US6630871B2 (en) 2001-09-28 2003-10-07 Intel Corporation Center-mass-reduced microbridge structures for ultra-high frequency MEM resonator
WO2010037085A1 (en) 2008-09-29 2010-04-01 The Board Of Trustees Of The University Of Illinois Dna sequencing and amplification systems using nanoscale field effect sensor arrays
CN101726752B (en) * 2008-10-23 2012-06-20 鸿富锦精密工业（深圳）有限公司 Earthquake monitoring system
JP2012528335A (en) 2009-05-27 2012-11-12 キング アブドゥーラ ユニバーシティ オブ サイエンス アンド テクノロジー MEMS mass-spring-damper system using out-of-plane suspension system
US8300999B2 (en) 2009-12-23 2012-10-30 Kotura, Inc. Reducing optical loss in reflective optical gratings
US8463093B2 (en) 2010-05-18 2013-06-11 Kotura, Inc. Extension of steps in reflective optical gratings
WO2011163058A2 (en) 2010-06-21 2011-12-29 The Board Of Trustees Of The University Of Illinois Cell mass measurement and apparatus
US9778042B2 (en) 2013-12-13 2017-10-03 Intel Corporation Opto-mechanical inertial sensor
US9285391B2 (en) * 2013-12-13 2016-03-15 Intel Corporation Optomechanical inertial sensor
CA2939354C (en) * 2014-02-28 2021-03-16 Russell Brands, Llc Data processing inside gaming device
WO2017206149A1 (en) * 2016-06-02 2017-12-07 Goertek.Inc Mems device and electronic apparatus
US11420777B1 (en) * 2019-02-15 2022-08-23 Lockheed Martin Corporation Spherical mobility system
US11079227B2 (en) 2019-04-01 2021-08-03 Honeywell International Inc. Accelerometer system enclosing gas
US11119116B2 (en) 2019-04-01 2021-09-14 Honeywell International Inc. Accelerometer for determining an acceleration based on modulated optical signals
US10705112B1 (en) 2019-04-22 2020-07-07 Honeywell International Inc. Noise rejection for optomechanical devices
US10956768B2 (en) 2019-04-22 2021-03-23 Honeywell International Inc. Feedback cooling and detection for optomechanical devices
US11119114B2 (en) 2019-07-17 2021-09-14 Honeywell International Inc. Anchor structure for securing optomechanical structure
US11408911B2 (en) 2019-07-17 2022-08-09 Honeywell International Inc. Optomechanical structure with corrugated edge
US11150264B2 (en) 2019-08-13 2021-10-19 Honeywell International Inc. Feedthrough rejection for optomechanical devices using elements
US11372019B2 (en) 2019-08-13 2022-06-28 Honeywell International Inc. Optomechanical resonator stabilization for optomechanical devices
US11408912B2 (en) 2019-08-13 2022-08-09 Honeywell International Inc. Feedthrough rejection for optomechanical devices
CN113126279B (en) * 2019-12-31 2022-10-18 成都理想境界科技有限公司 Optical fiber scanner and near-to-eye display system
CN112013951A (en) * 2020-09-09 2020-12-01 中国电子科技集团公司第三研究所 Thermal temperature difference type particle vibration velocity sensor
CN112613207B (en) * 2020-12-16 2024-06-21 西安稀有金属材料研究院有限公司 Method for quantitatively characterizing fracture toughness of hard film on metal surface
CN113340289B (en) * 2021-06-04 2023-01-24 西北工业大学 Chip-level disc type acousto-optic standing wave gyroscope
CN113624992B (en) * 2021-07-27 2024-06-21 南京邮电大学 Electric pump acceleration sensor and preparation method thereof

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4136510A1 (en) * 1991-11-06 1993-05-13 Battelle Institut E V Fibre-optic accelerometer detecting deflection of seismic mass - responds to misalignment of entry and exit fibres on cantilevered and fixed portions of Silicon@ chip
US5420688A (en) * 1992-12-14 1995-05-30 Farah; John Interferometric fiber optic displacement sensor
US5747808A (en) * 1994-02-14 1998-05-05 Engelhard Sensor Technologies NDIR gas sensor
US5721612A (en) * 1996-08-08 1998-02-24 Motorola, Inc. Optical pressure sensor and method therefor
US5990473A (en) * 1998-02-04 1999-11-23 Sandia Corporation Apparatus and method for sensing motion in a microelectro-mechanical system

Also Published As

Publication number Publication date
IL130045A0 (en) 2000-02-29
WO2000071981A1 (en) 2000-11-30

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase
TH Corrigenda

Free format text: IN VOL 15, NO 11, PAGE(S) 2136-2139 UNDER THE HEADING APPLICATIONS LAPSED, REFUSED OR WITHDRAWN PLEASE DELETE ALL REFERENCE TO APPLICATION NO. 44278/00

MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase