AU4298100A - Liquid supply unit and purging method in the liquid supply unit - Google Patents

Liquid supply unit and purging method in the liquid supply unit

Info

Publication number
AU4298100A
AU4298100A AU42981/00A AU4298100A AU4298100A AU 4298100 A AU4298100 A AU 4298100A AU 42981/00 A AU42981/00 A AU 42981/00A AU 4298100 A AU4298100 A AU 4298100A AU 4298100 A AU4298100 A AU 4298100A
Authority
AU
Australia
Prior art keywords
supply unit
liquid supply
purging method
purging
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU42981/00A
Inventor
Toshiyuki Nakagawa
Naoyuki Nakamoto
Kenji Nakamura
Osamu Nishiyama
Takashi Tsujiguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Publication of AU4298100A publication Critical patent/AU4298100A/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
    • B08B9/027—Cleaning the internal surfaces; Removal of blockages
    • B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
    • B08B9/0321—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4402—Reduction of impurities in the source gas

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
AU42981/00A 2000-04-07 2000-04-07 Liquid supply unit and purging method in the liquid supply unit Abandoned AU4298100A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2000/003750 WO2001076779A1 (en) 2000-04-07 2000-04-07 Liquid supply unit and purging method in the liquid supply unit

Publications (1)

Publication Number Publication Date
AU4298100A true AU4298100A (en) 2001-10-23

Family

ID=8163924

Family Applications (1)

Application Number Title Priority Date Filing Date
AU42981/00A Abandoned AU4298100A (en) 2000-04-07 2000-04-07 Liquid supply unit and purging method in the liquid supply unit

Country Status (2)

Country Link
AU (1) AU4298100A (en)
WO (1) WO2001076779A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2857283B1 (en) * 2003-07-09 2005-09-02 Soitec Silicon On Insulator PLATELET CLEANING DEVICE HAVING AN ISOLATION CIRCUIT FOR THE CONCENTRATION MONITOR.
JP2022118634A (en) * 2021-02-02 2022-08-15 東京エレクトロン株式会社 Powder conveying device, gas supply device and method for removing powder

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03193880A (en) * 1989-08-03 1991-08-23 Mikakutou Seimitsu Kogaku Kenkyusho:Kk Method and device for forming film at high rate by microwave plasma cvd under high pressure
JP3122311B2 (en) * 1994-06-29 2001-01-09 東京エレクトロン株式会社 Apparatus for supplying liquid material to film forming chamber and method of using the same

Also Published As

Publication number Publication date
WO2001076779A1 (en) 2001-10-18

Similar Documents

Publication Publication Date Title
AU2001222342A1 (en) Liquid supply apparatus
EP1158344A3 (en) Liquid crystal device and method for making the same
AU2411400A (en) Methods and apparatus for delivering fluids
AU2002301397A1 (en) Liquid Container, Liquid Supplying Apparatus, and Recording Apparatus
AU2001277126A1 (en) Methods for liquid metering in microchannels
HK1039589A1 (en) Maching method and mist supplying apparatus for use in the method
EP1146731A3 (en) Managing apparatus and method
AU5025900A (en) Storage stable fluid injection device and associated process
AU2001271653A1 (en) Printer apparatus with integrated graphical user interface and method for using the same
GB2370233B (en) Apparatus for use in behaviour modification and the like
AU1865301A (en) Method and device in reel change
AU2001243451A1 (en) Subterranean well completion apparatus with flow assurance system and associatedmethods
AU1719801A (en) Improvements in and relating to liquid dispensing apparatus
EP1306675A4 (en) Liquid dispensing method and device
AU2002225805A1 (en) Fluid delivery apparatus and method
AU1917900A (en) Fluid delivery apparatus and methods
AU2002243285A1 (en) Auxiliary metering apparatus and methods
AU2001260604A1 (en) Valve unit and container
AU4298100A (en) Liquid supply unit and purging method in the liquid supply unit
AU2001266171A1 (en) Liquid delivery apparatus
AU2002215837A1 (en) Supply component for gases and liquids
AU2001231806A1 (en) Method and apparatus in unwinding
AU5546900A (en) Improvements in or relating to dispensing apparatus
AU2001265147A1 (en) Method and apparatus for preventing stagnation in fluid reservoirs
GB9915322D0 (en) Liquid supply apparatus and method

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase