AU415646B2 - Nonreflecting photomasks and methods of making same - Google Patents

Nonreflecting photomasks and methods of making same

Info

Publication number
AU415646B2
AU415646B2 AU26484/67A AU2648467A AU415646B2 AU 415646 B2 AU415646 B2 AU 415646B2 AU 26484/67 A AU26484/67 A AU 26484/67A AU 2648467 A AU2648467 A AU 2648467A AU 415646 B2 AU415646 B2 AU 415646B2
Authority
AU
Australia
Prior art keywords
nonreflecting
photomasks
methods
making same
making
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU26484/67A
Other versions
AU2648467A (en
Inventor
Jex Sharp Donald
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of AU415646B2 publication Critical patent/AU415646B2/en
Publication of AU2648467A publication Critical patent/AU2648467A/en
Expired legal-status Critical Current

Links

AU26484/67A 1967-08-28 Nonreflecting photomasks and methods of making same Expired AU415646B2 (en)

Publications (2)

Publication Number Publication Date
AU415646B2 true AU415646B2 (en) 1969-03-06
AU2648467A AU2648467A (en) 1969-03-06

Family

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