AU4132399A - Magnetoresistive sensor element, especially angular sensor element - Google Patents

Magnetoresistive sensor element, especially angular sensor element

Info

Publication number
AU4132399A
AU4132399A AU41323/99A AU4132399A AU4132399A AU 4132399 A AU4132399 A AU 4132399A AU 41323/99 A AU41323/99 A AU 41323/99A AU 4132399 A AU4132399 A AU 4132399A AU 4132399 A AU4132399 A AU 4132399A
Authority
AU
Australia
Prior art keywords
sensor element
especially angular
magnetoresistive
magnetoresistive sensor
angular sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
AU41323/99A
Other versions
AU758991B2 (en
Inventor
Martin Freitag
Franz Jost
Klaus Marx
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of AU4132399A publication Critical patent/AU4132399A/en
Application granted granted Critical
Publication of AU758991B2 publication Critical patent/AU758991B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H01F10/3268—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn
    • H01F10/3281—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn only by use of asymmetry of the magnetic film pair itself, i.e. so-called pseudospin valve [PSV] structure, e.g. NiFe/Cu/Co

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
  • Thin Magnetic Films (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Magnetic Heads (AREA)
AU41323/99A 1998-09-22 1999-04-03 Magnetoresistive sensor element, especially angular sensor element Ceased AU758991B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE1998143349 DE19843349A1 (en) 1998-09-22 1998-09-22 Magneto-resistive sensor element for measurement of external magnetic field angle, especially in bridge circuits, has outer sensor layer comprised partially or completely of individual segments
DE19843349 1998-09-22
PCT/DE1999/001013 WO2000017666A1 (en) 1998-09-22 1999-04-03 Magnetoresistive sensor element, especially angular sensor element

Publications (2)

Publication Number Publication Date
AU4132399A true AU4132399A (en) 2000-04-10
AU758991B2 AU758991B2 (en) 2003-04-03

Family

ID=7881778

Family Applications (1)

Application Number Title Priority Date Filing Date
AU41323/99A Ceased AU758991B2 (en) 1998-09-22 1999-04-03 Magnetoresistive sensor element, especially angular sensor element

Country Status (5)

Country Link
EP (1) EP1046046A1 (en)
JP (1) JP2002525609A (en)
AU (1) AU758991B2 (en)
DE (1) DE19843349A1 (en)
WO (1) WO2000017666A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10255327A1 (en) * 2002-11-27 2004-06-24 Robert Bosch Gmbh Magnetoresistive sensor element and method for reducing the angular error of a magnetoresistive sensor element
JP5590349B2 (en) 2012-07-18 2014-09-17 Ｔｄｋ株式会社 Magnetic sensor system
US10096767B2 (en) * 2013-03-09 2018-10-09 Taiwan Semiconductor Manufacturing Company, Ltd. Elongated magnetoresistive tunnel junction structure

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW265440B (en) * 1993-04-30 1995-12-11 Ibm
US5452163A (en) * 1993-12-23 1995-09-19 International Business Machines Corporation Multilayer magnetoresistive sensor
DE19507303A1 (en) * 1995-03-02 1996-09-05 Siemens Ag Sensor device with a bridge circuit of magnetoresistive sensor elements
JP3886589B2 (en) * 1997-03-07 2007-02-28 アルプス電気株式会社 Giant magnetoresistive element sensor

Also Published As

Publication number Publication date
JP2002525609A (en) 2002-08-13
DE19843349A1 (en) 2000-03-23
WO2000017666A1 (en) 2000-03-30
AU758991B2 (en) 2003-04-03
EP1046046A1 (en) 2000-10-25

Similar Documents

Publication Publication Date Title
AU3206900A (en) Position sensing system
AU3664899A (en) Substrate sensor
AU2069099A (en) Sensor
AU4420800A (en) Position sensor
AU2182199A (en) Micro-electro-opto-mechanical inertial sensor
AUPQ835100A0 (en) Position sensor
AU2873200A (en) Non-contacting sensors
AU4391799A (en) Fence sensor
AU2001288572A1 (en) Rotary position sensor
AU5554099A (en) Motion sensor
AU7683700A (en) Co sensor
AU7775600A (en) Optolelectronic steering angle sensor
AU1738700A (en) Slotted quantum well sensor
AU2311500A (en) Position sensing
AU2833500A (en) Sensor element
AU5036299A (en) Thermosorption sensor
AU4086001A (en) Sensor systems
AU4290199A (en) Semiconductor position sensor
AU1289001A (en) Sensor assembly
AU5473000A (en) Linear displacement sensor
EP0681286A3 (en) Dual element magnetoresistive sensor.
AU4391699A (en) Embedded sensor
AU9460598A (en) Semiconductor position sensor
AU4132399A (en) Magnetoresistive sensor element, especially angular sensor element
AU5848600A (en) Glass-mounted sensor

Legal Events

Date Code Title Description
FGA Letters patent sealed or granted (standard patent)
MK14 Patent ceased section 143(a) (annual fees not paid) or expired