AU410145B2 - Contactless probe system - Google Patents

Contactless probe system

Info

Publication number
AU410145B2
AU410145B2 AU23897/67A AU2389767A AU410145B2 AU 410145 B2 AU410145 B2 AU 410145B2 AU 23897/67 A AU23897/67 A AU 23897/67A AU 2389767 A AU2389767 A AU 2389767A AU 410145 B2 AU410145 B2 AU 410145B2
Authority
AU
Australia
Prior art keywords
probe system
contactless probe
contactless
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU23897/67A
Other versions
AU2389767A (en
Inventor
SCHIRO TANIGUCHI and TAKAYUKI MIYAZAWA SHIGERU ANDO
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to AU23897/67A priority Critical patent/AU410145B2/en
Publication of AU2389767A publication Critical patent/AU2389767A/en
Application granted granted Critical
Publication of AU410145B2 publication Critical patent/AU410145B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/025—Testing optical properties by measuring geometrical properties or aberrations by determining the shape of the object to be tested

Landscapes

  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
AU23897/67A 1967-06-29 1967-06-29 Contactless probe system Expired AU410145B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU23897/67A AU410145B2 (en) 1967-06-29 1967-06-29 Contactless probe system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AU23897/67A AU410145B2 (en) 1967-06-29 1967-06-29 Contactless probe system

Publications (2)

Publication Number Publication Date
AU2389767A AU2389767A (en) 1969-01-09
AU410145B2 true AU410145B2 (en) 1971-02-04

Family

ID=3712939

Family Applications (1)

Application Number Title Priority Date Filing Date
AU23897/67A Expired AU410145B2 (en) 1967-06-29 1967-06-29 Contactless probe system

Country Status (1)

Country Link
AU (1) AU410145B2 (en)

Also Published As

Publication number Publication date
AU2389767A (en) 1969-01-09

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