AU408507B2 - Method of diffusing an impurity into a semiconductor wafer - Google Patents

Method of diffusing an impurity into a semiconductor wafer

Info

Publication number
AU408507B2
AU408507B2 AU4535/66A AU453566A AU408507B2 AU 408507 B2 AU408507 B2 AU 408507B2 AU 4535/66 A AU4535/66 A AU 4535/66A AU 453566 A AU453566 A AU 453566A AU 408507 B2 AU408507 B2 AU 408507B2
Authority
AU
Australia
Prior art keywords
diffusing
impurity
semiconductor wafer
wafer
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU4535/66A
Other versions
AU453566A (en
Inventor
Goldsmith Norman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RCA Corp filed Critical RCA Corp
Application granted granted Critical
Publication of AU408507B2 publication Critical patent/AU408507B2/en
Publication of AU453566A publication Critical patent/AU453566A/en
Expired legal-status Critical Current

Links

AU4535/66A 1965-05-10 1966-04-21 Method of diffusing an impurity into a semiconductor wafer Expired AU408507B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
USUS454,474 1965-05-10

Publications (2)

Publication Number Publication Date
AU408507B2 true AU408507B2 (en) 1967-10-26
AU453566A AU453566A (en) 1967-10-26

Family

ID=

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