AU400362B2 - Improvements in or relating to sputtering processes - Google Patents

Improvements in or relating to sputtering processes

Info

Publication number
AU400362B2
AU400362B2 AU12811/66A AU1281166A AU400362B2 AU 400362 B2 AU400362 B2 AU 400362B2 AU 12811/66 A AU12811/66 A AU 12811/66A AU 1281166 A AU1281166 A AU 1281166A AU 400362 B2 AU400362 B2 AU 400362B2
Authority
AU
Australia
Prior art keywords
relating
sputtering processes
sputtering
processes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU12811/66A
Other versions
AU1281166A (en
Inventor
LELAND CASWELL and EMANUEL STERN HOLLIS
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of AU400362B2 publication Critical patent/AU400362B2/en
Publication of AU1281166A publication Critical patent/AU1281166A/en
Expired legal-status Critical Current

Links

AU12811/66A 1965-11-15 1966-10-19 Improvements in or relating to sputtering processes Expired AU400362B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
USUS507729 1965-11-15

Publications (2)

Publication Number Publication Date
AU400362B2 true AU400362B2 (en) 1968-04-26
AU1281166A AU1281166A (en) 1968-04-26

Family

ID=

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