AU3770093A - Pressure sensor and method - Google Patents
Pressure sensor and methodInfo
- Publication number
- AU3770093A AU3770093A AU37700/93A AU3770093A AU3770093A AU 3770093 A AU3770093 A AU 3770093A AU 37700/93 A AU37700/93 A AU 37700/93A AU 3770093 A AU3770093 A AU 3770093A AU 3770093 A AU3770093 A AU 3770093A
- Authority
- AU
- Australia
- Prior art keywords
- pressure sensor
- sensor
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
- G01N11/02—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by measuring flow of the material
- G01N11/04—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by measuring flow of the material through a restricted passage, e.g. tube, aperture
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NZ24075192 | 1992-03-12 | ||
NZ240751 | 1992-03-12 | ||
NZ242475 | 1992-04-23 | ||
NZ24247592 | 1992-04-23 | ||
PCT/NZ1993/000016 WO1993018381A1 (en) | 1992-03-12 | 1993-03-12 | Pressure sensor and method |
Publications (1)
Publication Number | Publication Date |
---|---|
AU3770093A true AU3770093A (en) | 1993-10-05 |
Family
ID=26651029
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU37700/93A Abandoned AU3770093A (en) | 1992-03-12 | 1993-03-12 | Pressure sensor and method |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPH07504980A (en) |
AU (1) | AU3770093A (en) |
WO (1) | WO1993018381A1 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7287415B2 (en) * | 2004-09-30 | 2007-10-30 | Teledyne Licensing, Llc | Microelectromechanical system (MEMS) viscosity sensor for fluid health monitoring |
WO2012140846A1 (en) * | 2011-04-12 | 2012-10-18 | パナソニック株式会社 | Mems pressure sensor |
JP2014115209A (en) * | 2012-12-11 | 2014-06-26 | Seiko Epson Corp | Mems element, electronic device, altimeter, electronic apparatus and moving body |
US9778238B2 (en) * | 2014-09-09 | 2017-10-03 | Ams International Ag | Resonant CO2 sensing with mitigation of cross-sensitivities |
EP3211393A1 (en) * | 2016-02-29 | 2017-08-30 | ETH Zürich | Mems device using a released device layer as membrane |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3808480A (en) * | 1973-04-16 | 1974-04-30 | Bunker Ramo | Capacitive pressure transducer |
CH639762A5 (en) * | 1980-11-12 | 1983-11-30 | Centre Electron Horloger | PRESSURE TRANSDUCER WITH VIBRATING ELEMENT. |
US4479070A (en) * | 1983-06-10 | 1984-10-23 | Sperry Corporation | Vibrating quartz diaphragm pressure sensor |
US4523474A (en) * | 1983-08-12 | 1985-06-18 | Borg-Warner Corporation | Capacitive pressure sensor |
-
1993
- 1993-03-12 AU AU37700/93A patent/AU3770093A/en not_active Abandoned
- 1993-03-12 JP JP5515568A patent/JPH07504980A/en active Pending
- 1993-03-12 WO PCT/NZ1993/000016 patent/WO1993018381A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
JPH07504980A (en) | 1995-06-01 |
WO1993018381A1 (en) | 1993-09-16 |
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