AU3363199A - Self tracking beam delivery system - Google Patents

Self tracking beam delivery system

Info

Publication number
AU3363199A
AU3363199A AU33631/99A AU3363199A AU3363199A AU 3363199 A AU3363199 A AU 3363199A AU 33631/99 A AU33631/99 A AU 33631/99A AU 3363199 A AU3363199 A AU 3363199A AU 3363199 A AU3363199 A AU 3363199A
Authority
AU
Australia
Prior art keywords
delivery system
beam delivery
tracking beam
self tracking
self
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU33631/99A
Inventor
Robert F. Dillon
Philip D Henshaw
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sparta Inc
Original Assignee
Sparta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sparta Inc filed Critical Sparta Inc
Publication of AU3363199A publication Critical patent/AU3363199A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
AU33631/99A 1999-03-26 1999-03-26 Self tracking beam delivery system Abandoned AU3363199A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US1999/006460 WO2000058689A1 (en) 1999-03-26 1999-03-26 Self tracking beam delivery system

Publications (1)

Publication Number Publication Date
AU3363199A true AU3363199A (en) 2000-10-16

Family

ID=22272431

Family Applications (1)

Application Number Title Priority Date Filing Date
AU33631/99A Abandoned AU3363199A (en) 1999-03-26 1999-03-26 Self tracking beam delivery system

Country Status (2)

Country Link
AU (1) AU3363199A (en)
WO (1) WO2000058689A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI304157B (en) * 2002-11-27 2008-12-11 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
CN106436510B (en) * 2016-08-29 2018-04-17 重庆单轨交通工程有限责任公司 Cross-saddle single-track traffic circuit linear measurement method and measuring device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3653827B2 (en) * 1995-10-20 2005-06-02 株式会社ニコン Interferometer

Also Published As

Publication number Publication date
WO2000058689A1 (en) 2000-10-05

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase