AU3255293A - Micromechanical filter and method for the manufacture thereof - Google Patents

Micromechanical filter and method for the manufacture thereof

Info

Publication number
AU3255293A
AU3255293A AU32552/93A AU3255293A AU3255293A AU 3255293 A AU3255293 A AU 3255293A AU 32552/93 A AU32552/93 A AU 32552/93A AU 3255293 A AU3255293 A AU 3255293A AU 3255293 A AU3255293 A AU 3255293A
Authority
AU
Australia
Prior art keywords
manufacture
micromechanical filter
micromechanical
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU32552/93A
Other languages
English (en)
Inventor
Jens Anders Branebjerg
Peter Gravesen
Ole Sondergaard Jensen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Danfoss AS
Original Assignee
Danfoss AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Danfoss AS filed Critical Danfoss AS
Publication of AU3255293A publication Critical patent/AU3255293A/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081—After-treatment of organic or inorganic membranes
    • B01D67/0093—Chemical modification
    • B01D67/00933—Chemical modification by addition of a layer chemically bonded to the membrane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081—After-treatment of organic or inorganic membranes
    • B01D67/0093—Chemical modification
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/14—Other self-supporting filtering material ; Other filtering material
    • B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/24—Dialysis ; Membrane extraction
    • B01D61/28—Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/0058—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by selective elimination of components, e.g. by leaching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/12—Composite membranes; Ultra-thin membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/12—Composite membranes; Ultra-thin membranes
    • B01D69/1216—Three or more layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/0213—Silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Urology & Nephrology (AREA)
  • Water Supply & Treatment (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Sampling And Sample Adjustment (AREA)
AU32552/93A 1991-12-12 1992-12-03 Micromechanical filter and method for the manufacture thereof Abandoned AU3255293A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4140922A DE4140922C1 (de) 1991-12-12 1991-12-12
DE4140922 1991-12-12

Publications (1)

Publication Number Publication Date
AU3255293A true AU3255293A (en) 1993-07-19

Family

ID=6446841

Family Applications (1)

Application Number Title Priority Date Filing Date
AU32552/93A Abandoned AU3255293A (en) 1991-12-12 1992-12-03 Micromechanical filter and method for the manufacture thereof

Country Status (4)

Country Link
EP (1) EP0643616A1 (de)
AU (1) AU3255293A (de)
DE (1) DE4140922C1 (de)
WO (1) WO1993011862A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6007676A (en) 1992-09-29 1999-12-28 Boehringer Ingelheim International Gmbh Atomizing nozzle and filter and spray generating device
US5770076A (en) * 1994-03-07 1998-06-23 The Regents Of The University Of California Micromachined capsules having porous membranes and bulk supports
US5985328A (en) * 1994-03-07 1999-11-16 Regents Of The University Of California Micromachined porous membranes with bulk support
US5798042A (en) * 1994-03-07 1998-08-25 Regents Of The University Of California Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters
US5985164A (en) * 1994-03-07 1999-11-16 Regents Of The University Of California Method for forming a filter
US5938923A (en) * 1997-04-15 1999-08-17 The Regents Of The University Of California Microfabricated filter and capsule using a substrate sandwich
DE19742439C1 (de) * 1997-09-26 1998-10-22 Boehringer Ingelheim Int Mikrostrukturiertes Filter
JP2014525343A (ja) 2011-09-04 2014-09-29 アジレント・テクノロジーズ・インク 流体測定用デブリフィルタ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE463654B (sv) * 1988-03-11 1991-01-07 Nils Goeran Stemme Membranstruktur samt saett att framstaella densamma

Also Published As

Publication number Publication date
EP0643616A1 (de) 1995-03-22
DE4140922C1 (de) 1993-07-29
WO1993011862A1 (en) 1993-06-24

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