AU3125763A - Apparatus and method for controlling deposition ofmaterial - Google Patents

Apparatus and method for controlling deposition ofmaterial

Info

Publication number
AU3125763A
AU3125763A AU31257/63A AU3125763A AU3125763A AU 3125763 A AU3125763 A AU 3125763A AU 31257/63 A AU31257/63 A AU 31257/63A AU 3125763 A AU3125763 A AU 3125763A AU 3125763 A AU3125763 A AU 3125763A
Authority
AU
Australia
Prior art keywords
ofmaterial
controlling deposition
deposition
controlling
deposition ofmaterial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
AU31257/63A
Other versions
AU287975B2 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
James River Corp of Nevada
Original Assignee
Crown Zellerbach Corp
Filing date
Publication date
Application filed by Crown Zellerbach Corp filed Critical Crown Zellerbach Corp
Application granted granted Critical
Publication of AU3125763A publication Critical patent/AU3125763A/en
Publication of AU287975B2 publication Critical patent/AU287975B2/en
Expired legal-status Critical Current

Links

AU31257/63A 1963-05-22 Apparatus and method for controlling deposition ofmaterial Expired AU287975B2 (en)

Publications (2)

Publication Number Publication Date
AU3125763A true AU3125763A (en) 1984-12-03
AU287975B2 AU287975B2 (en) 1984-12-03

Family

ID=

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