AU292101B2 - Method for producing separated semiconductor areas with low parasitic capacitance ina microminiuaturised circuit arrangement
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Method for producing separated semiconductor areas with low parasitic capacitance ina microminiuaturised circuit arrangement
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AU64063/65A1964-09-171965-09-15Method for producing separated semiconductor areas with low parasitic capacitance ina microminiuaturised circuit arrangement
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