AU2751101A - Via inspection in optical inspection system - Google Patents

Via inspection in optical inspection system

Info

Publication number
AU2751101A
AU2751101A AU27511/01A AU2751101A AU2751101A AU 2751101 A AU2751101 A AU 2751101A AU 27511/01 A AU27511/01 A AU 27511/01A AU 2751101 A AU2751101 A AU 2751101A AU 2751101 A AU2751101 A AU 2751101A
Authority
AU
Australia
Prior art keywords
inspection
optical
inspection system
optical inspection
via inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU27511/01A
Inventor
Gary E. Frame
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MIDAS VISION SYSEMS Inc
Original Assignee
MIDAS VISION SYSEMS Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MIDAS VISION SYSEMS Inc filed Critical MIDAS VISION SYSEMS Inc
Publication of AU2751101A publication Critical patent/AU2751101A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95692—Patterns showing hole parts, e.g. honeycomb filtering structures

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
AU27511/01A 1999-11-05 2000-11-06 Via inspection in optical inspection system Abandoned AU2751101A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US43488599A 1999-11-05 1999-11-05
US09434885 1999-11-05
PCT/US2000/041911 WO2001036929A2 (en) 1999-11-05 2000-11-06 Via inspection with an optical inspection system

Publications (1)

Publication Number Publication Date
AU2751101A true AU2751101A (en) 2001-05-30

Family

ID=23726097

Family Applications (1)

Application Number Title Priority Date Filing Date
AU27511/01A Abandoned AU2751101A (en) 1999-11-05 2000-11-06 Via inspection in optical inspection system

Country Status (3)

Country Link
AU (1) AU2751101A (en)
TW (1) TW466337B (en)
WO (1) WO2001036929A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111795954B (en) * 2020-09-09 2020-11-24 苏州鼎纳自动化技术有限公司 Transmittance precision detection mechanism

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4560273A (en) * 1982-11-30 1985-12-24 Fujitsu Limited Method and apparatus for inspecting plated through holes in printed circuit boards
US4655349A (en) * 1984-12-27 1987-04-07 Brockway, Inc. System for automatically inspecting transparent containers for sidewall and dimensional defects
ZA875450B (en) * 1986-07-28 1988-04-27 Saint Gobain Cinematique Inspection of transparent bodies
US4818617A (en) * 1986-08-14 1989-04-04 Stock Larry A Method and material for checking drilled printed circuit boards
US5301012A (en) * 1992-10-30 1994-04-05 International Business Machines Corporation Optical technique for rapid inspection of via underetch and contamination

Also Published As

Publication number Publication date
TW466337B (en) 2001-12-01
WO2001036929A3 (en) 2001-12-06
WO2001036929A2 (en) 2001-05-25

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase