AU274778B2 - A method of metal displacement cleaning of semiconductor surfaces - Google Patents

A method of metal displacement cleaning of semiconductor surfaces

Info

Publication number
AU274778B2
AU274778B2 AU41021/64A AU4102164A AU274778B2 AU 274778 B2 AU274778 B2 AU 274778B2 AU 41021/64 A AU41021/64 A AU 41021/64A AU 4102164 A AU4102164 A AU 4102164A AU 274778 B2 AU274778 B2 AU 274778B2
Authority
AU
Australia
Prior art keywords
semiconductor surfaces
metal displacement
displacement cleaning
cleaning
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU41021/64A
Other versions
AU4102164A (en
Inventor
Lee Klein Donald
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Application granted granted Critical
Publication of AU274778B2 publication Critical patent/AU274778B2/en
Publication of AU4102164A publication Critical patent/AU4102164A/en
Expired legal-status Critical Current

Links

AU41021/64A 1964-02-18 A method of metal displacement cleaning of semiconductor surfaces Expired AU274778B2 (en)

Publications (2)

Publication Number Publication Date
AU274778B2 true AU274778B2 (en) 1965-08-19
AU4102164A AU4102164A (en) 1965-08-19

Family

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