Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NVfiledCriticalPhilips Gloeilampenfabrieken NV
Application grantedgrantedCritical
Publication of AU269729B2publicationCriticalpatent/AU269729B2/en
Publication of AU2194362ApublicationCriticalpatent/AU2194362A/en
AU21943/62A1961-09-121962-09-10Improvements in or relating to apparatus and methods forthe manufacture of semiconductor. devices
ExpiredAU269729B2
(en)