AU2539299A - Apparatus for the investigation of surface chemistry - Google Patents

Apparatus for the investigation of surface chemistry

Info

Publication number
AU2539299A
AU2539299A AU25392/99A AU2539299A AU2539299A AU 2539299 A AU2539299 A AU 2539299A AU 25392/99 A AU25392/99 A AU 25392/99A AU 2539299 A AU2539299 A AU 2539299A AU 2539299 A AU2539299 A AU 2539299A
Authority
AU
Australia
Prior art keywords
investigation
surface chemistry
chemistry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU25392/99A
Inventor
Christopher Budd
Stewart Robert Chesterfield
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Matra Bae Dynamics UK Ltd
Original Assignee
Matra Bae Dynamics UK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matra Bae Dynamics UK Ltd filed Critical Matra Bae Dynamics UK Ltd
Publication of AU2539299A publication Critical patent/AU2539299A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
    • G01N21/718—Laser microanalysis, i.e. with formation of sample plasma
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
    • H05H1/005—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by using X-rays or alpha rays
AU25392/99A 1998-02-26 1999-02-18 Apparatus for the investigation of surface chemistry Abandoned AU2539299A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB9803932.4A GB9803932D0 (en) 1998-02-26 1998-02-26 Apparatus for the investigation of surface chemistry
GB9803932 1998-02-26
PCT/GB1999/000517 WO1999044399A1 (en) 1998-02-26 1999-02-18 Apparatus for the investigation of surface chemistry

Publications (1)

Publication Number Publication Date
AU2539299A true AU2539299A (en) 1999-09-15

Family

ID=10827547

Family Applications (1)

Application Number Title Priority Date Filing Date
AU25392/99A Abandoned AU2539299A (en) 1998-02-26 1999-02-18 Apparatus for the investigation of surface chemistry

Country Status (5)

Country Link
EP (1) EP1059018A1 (en)
JP (1) JP2002509614A (en)
AU (1) AU2539299A (en)
GB (1) GB9803932D0 (en)
WO (1) WO1999044399A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2384303A (en) * 2001-09-24 2003-07-23 Pure Wafer Ltd Detection of metals in semiconductor wafers
US7186981B2 (en) * 2003-07-29 2007-03-06 Thermal Wave Imaging, Inc. Method and apparatus for thermographic imaging using flash pulse truncation

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4445762A1 (en) * 1994-12-21 1996-06-27 Adolf Slaby Inst Forschungsges Method and device for determining absolute plasma parameters
US5989349A (en) * 1997-06-24 1999-11-23 Applied Materials, Inc. Diagnostic pedestal assembly for a semiconductor wafer processing system

Also Published As

Publication number Publication date
GB9803932D0 (en) 1998-04-22
JP2002509614A (en) 2002-03-26
EP1059018A1 (en) 2000-12-13
WO1999044399A1 (en) 1999-09-02

Similar Documents

Publication Publication Date Title
AU6167899A (en) Biopsy apparatus
AU6396499A (en) Biomedical apparatus
AU4838097A (en) Apparatus for the treatment of specimens
AU6449798A (en) Apparatus and methods for the preparation of chemical compounds
GB2336693B (en) Assembly process apparatus
AU4546899A (en) Apparatus for separating molecules
AU6272999A (en) Direction finding apparatus
AU3077699A (en) Apparatus for performing hippotherapy
AUPP108697A0 (en) Apparatus for electrophoresis
AU1890899A (en) Imaging apparatus
AU4805499A (en) Floating electric apparatus
AU2060100A (en) Cleaning apparatus
AU4221699A (en) Painting apparatus
AU6357899A (en) Liquid heating apparatus
AU8239198A (en) Apparatus for measuring the temperature of wafers
AU5231398A (en) Apparatus for the analysis of liquid
AU2739399A (en) Photobioreactor apparatus
AU3245799A (en) Method for activating the functions of an electrical apparatus
AU2539299A (en) Apparatus for the investigation of surface chemistry
GB2341026B (en) Apparatus for the measurement of direction
AU5435999A (en) Apparatus having partially gold-plated surface
AU4633799A (en) Apparatus for assessment of grip function
GB9804570D0 (en) Navigational apparatus
AU3056999A (en) Recording apparatus
AU5065499A (en) Recording apparatus

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase