AU214713B2 - Improvements in or relating to photolithography - Google Patents

Improvements in or relating to photolithography

Info

Publication number
AU214713B2
AU214713B2 AU18618/56A AU1861856A AU214713B2 AU 214713 B2 AU214713 B2 AU 214713B2 AU 18618/56 A AU18618/56 A AU 18618/56A AU 1861856 A AU1861856 A AU 1861856A AU 214713 B2 AU214713 B2 AU 214713B2
Authority
AU
Australia
Prior art keywords
photolithography
relating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU18618/56A
Other versions
AU1861856A (en
Inventor
Spencer Alexander
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NRG Manufacturing Ltd
Original Assignee
NRG Manufacturing Ltd
Filing date
Publication date
Application filed by NRG Manufacturing Ltd filed Critical NRG Manufacturing Ltd
Application granted granted Critical
Publication of AU1861856A publication Critical patent/AU1861856A/en
Publication of AU214713B2 publication Critical patent/AU214713B2/en
Expired legal-status Critical Current

Links

AU18618/56A 1956-05-29 Improvements in or relating to photolithography Expired AU214713B2 (en)

Publications (2)

Publication Number Publication Date
AU1861856A AU1861856A (en) 1956-11-29
AU214713B2 true AU214713B2 (en) 1956-11-29

Family

ID=

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