AU2067988A - Improvements in plasma generators - Google Patents

Improvements in plasma generators

Info

Publication number
AU2067988A
AU2067988A AU20679/88A AU2067988A AU2067988A AU 2067988 A AU2067988 A AU 2067988A AU 20679/88 A AU20679/88 A AU 20679/88A AU 2067988 A AU2067988 A AU 2067988A AU 2067988 A AU2067988 A AU 2067988A
Authority
AU
Australia
Prior art keywords
plasma generators
generators
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
AU20679/88A
Other versions
AU602109B2 (en
Inventor
Istvan Kristof Varga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commonwealth of Australia
Original Assignee
Commonwealth of Australia
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commonwealth of Australia filed Critical Commonwealth of Australia
Priority to AU20679/88A priority Critical patent/AU602109B2/en
Publication of AU2067988A publication Critical patent/AU2067988A/en
Application granted granted Critical
Publication of AU602109B2 publication Critical patent/AU602109B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/461—Microwave discharges

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
AU20679/88A 1987-08-13 1988-08-12 Improvements in plasma generators Ceased AU602109B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU20679/88A AU602109B2 (en) 1987-08-13 1988-08-12 Improvements in plasma generators

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
AUPI373387 1987-08-13
AUPI3733 1987-08-13
AUPI633688 1988-01-18
AUPI6336 1988-01-18
AU20679/88A AU602109B2 (en) 1987-08-13 1988-08-12 Improvements in plasma generators

Publications (2)

Publication Number Publication Date
AU2067988A true AU2067988A (en) 1989-02-16
AU602109B2 AU602109B2 (en) 1990-09-27

Family

ID=27152600

Family Applications (1)

Application Number Title Priority Date Filing Date
AU20679/88A Ceased AU602109B2 (en) 1987-08-13 1988-08-12 Improvements in plasma generators

Country Status (1)

Country Link
AU (1) AU602109B2 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3655508A (en) * 1968-06-12 1972-04-11 Itt Electrostatic field apparatus for reducing leakage of plasma from magnetic type fusion reactors
WO1986006922A1 (en) * 1985-05-09 1986-11-20 The Commonwealth Of Australia Plasma generator

Also Published As

Publication number Publication date
AU602109B2 (en) 1990-09-27

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