AU2024897A - Micro-machined membrane valve - Google Patents

Micro-machined membrane valve

Info

Publication number
AU2024897A
AU2024897A AU20248/97A AU2024897A AU2024897A AU 2024897 A AU2024897 A AU 2024897A AU 20248/97 A AU20248/97 A AU 20248/97A AU 2024897 A AU2024897 A AU 2024897A AU 2024897 A AU2024897 A AU 2024897A
Authority
AU
Australia
Prior art keywords
micro
membrane valve
machined membrane
machined
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU20248/97A
Inventor
Didier Maillefer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Westonbridge International Ltd
Original Assignee
Westonbridge International Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westonbridge International Ltd filed Critical Westonbridge International Ltd
Publication of AU2024897A publication Critical patent/AU2024897A/en
Abandoned legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1037—Flap valves
    • F04B53/1047—Flap valves the valve being formed by one or more flexible elements
    • F04B53/106—Flap valves the valve being formed by one or more flexible elements the valve being a membrane
    • F04B53/1067—Flap valves the valve being formed by one or more flexible elements the valve being a membrane fixed at its whole periphery and with an opening at its centre
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Micromachines (AREA)
AU20248/97A 1996-03-05 1997-03-05 Micro-machined membrane valve Abandoned AU2024897A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR9602735 1996-03-05
FR9602735 1996-03-05
PCT/EP1997/001146 WO1997033094A1 (en) 1996-03-05 1997-03-05 Micro-machined membrane valve

Publications (1)

Publication Number Publication Date
AU2024897A true AU2024897A (en) 1997-09-22

Family

ID=9489863

Family Applications (1)

Application Number Title Priority Date Filing Date
AU20248/97A Abandoned AU2024897A (en) 1996-03-05 1997-03-05 Micro-machined membrane valve

Country Status (2)

Country Link
AU (1) AU2024897A (en)
WO (1) WO1997033094A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2817604B1 (en) * 2000-12-01 2004-04-23 Biomerieux Sa VALVES ACTIVATED BY ELECTRO-ACTIVE POLYMERS OR BY SHAPE MEMORY MATERIALS, DEVICE CONTAINING SUCH VALVES AND METHOD FOR IMPLEMENTING
FR3090792B1 (en) * 2018-12-21 2021-01-22 Commissariat Energie Atomique Non-return fluidic valve device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4869282A (en) * 1988-12-09 1989-09-26 Rosemount Inc. Micromachined valve with polyimide film diaphragm
DE3917423C1 (en) * 1989-05-29 1990-05-31 Buerkert Gmbh & Co Werk Ingelfingen, 7118 Ingelfingen, De
US5082242A (en) * 1989-12-27 1992-01-21 Ulrich Bonne Electronic microvalve apparatus and fabrication
DE4139668A1 (en) * 1991-12-02 1993-06-03 Kernforschungsz Karlsruhe MICROVALVE AND METHOD FOR THE PRODUCTION THEREOF
JPH09505130A (en) * 1993-09-24 1997-05-20 ローズマウント アナリティカル インコーポレイテッド Micromachined valve device

Also Published As

Publication number Publication date
WO1997033094A1 (en) 1997-09-12

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