AU2017204549B2 - System and method for controlling a thermal array - Google Patents

System and method for controlling a thermal array Download PDF

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Publication number
AU2017204549B2
AU2017204549B2 AU2017204549A AU2017204549A AU2017204549B2 AU 2017204549 B2 AU2017204549 B2 AU 2017204549B2 AU 2017204549 A AU2017204549 A AU 2017204549A AU 2017204549 A AU2017204549 A AU 2017204549A AU 2017204549 B2 AU2017204549 B2 AU 2017204549B2
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AU
Australia
Prior art keywords
thermal element
calculate
setpoints
controlling
thermal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU2017204549A
Other versions
AU2017204549A1 (en
Inventor
John F. Lemke
Phillip S. SCHMIDT
Cal T. Swanson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Watlow Electric Manufacturing Co
Original Assignee
Watlow Electric Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US2012/053049 external-priority patent/WO2013033332A1/en
Application filed by Watlow Electric Manufacturing Co filed Critical Watlow Electric Manufacturing Co
Priority to AU2017204549A priority Critical patent/AU2017204549B2/en
Publication of AU2017204549A1 publication Critical patent/AU2017204549A1/en
Application granted granted Critical
Publication of AU2017204549B2 publication Critical patent/AU2017204549B2/en
Ceased legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Control Of Resistance Heating (AREA)
  • User Interface Of Digital Computer (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Control Of Electric Motors In General (AREA)

Abstract

A system and method is provided. The system and method calculate target setpoints for each thermal element and index through each thermal element to provide power to the thermal element, sense an electrical characteristic of the thermal element, and determine if the thermal element exceeds a target setpoint for the thermal element based on the sensed electrical characteristic. WO 2013/033332 PCT/US2012/053049 Control 61 Calculate -/-612 Setpoints Calculate Time Windows 614 For Each Thermal Element Is End Of Yes Time w Increment To Window Next Thermal Element 62 No A Power and Measure Thermal Element Characteristics Post thermalYe Element Setpoint Based on Measured Characteristics 628 630 No FIG. 6a
AU2017204549A 2011-08-30 2017-07-03 System and method for controlling a thermal array Ceased AU2017204549B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2017204549A AU2017204549B2 (en) 2011-08-30 2017-07-03 System and method for controlling a thermal array

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
US201161528939P 2011-08-30 2011-08-30
US61/528,939 2011-08-30
US201261635310P 2012-04-19 2012-04-19
US61/635,310 2012-04-19
PCT/US2012/053049 WO2013033332A1 (en) 2011-08-30 2012-08-30 System and method for controlling a thermal array
AU2012301936A AU2012301936A1 (en) 2011-08-30 2012-08-30 System and method for controlling a thermal array
AU2015203195A AU2015203195B2 (en) 2011-08-30 2015-06-15 System and method for controlling a thermal array
AU2017204549A AU2017204549B2 (en) 2011-08-30 2017-07-03 System and method for controlling a thermal array

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
AU2015203195A Division AU2015203195B2 (en) 2011-08-30 2015-06-15 System and method for controlling a thermal array

Publications (2)

Publication Number Publication Date
AU2017204549A1 AU2017204549A1 (en) 2017-07-20
AU2017204549B2 true AU2017204549B2 (en) 2020-01-30

Family

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AU2015203195A Ceased AU2015203195B2 (en) 2011-08-30 2015-06-15 System and method for controlling a thermal array
AU2017204549A Ceased AU2017204549B2 (en) 2011-08-30 2017-07-03 System and method for controlling a thermal array

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Application Number Title Priority Date Filing Date
AU2015203195A Ceased AU2015203195B2 (en) 2011-08-30 2015-06-15 System and method for controlling a thermal array

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AU (2) AU2015203195B2 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060144516A1 (en) * 2004-12-30 2006-07-06 Lam Research Inc., A Delaware Corporation Apparatus for spatial and temporal control of temperature on a substrate
US20080047952A1 (en) * 2006-07-19 2008-02-28 Ngk Insulators, Ltd. Electrostatic chuck heater
EP2203028A1 (en) * 2008-12-26 2010-06-30 Omron Co., Ltd. Wiring structure, heater driving device, measuring device, and control system
US20110092072A1 (en) * 2009-10-21 2011-04-21 Lam Research Corporation Heating plate with planar heating zones for semiconductor processing

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3752956A (en) * 1972-05-03 1973-08-14 Du Pont Electrical resistance heating control circuit

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060144516A1 (en) * 2004-12-30 2006-07-06 Lam Research Inc., A Delaware Corporation Apparatus for spatial and temporal control of temperature on a substrate
US20080047952A1 (en) * 2006-07-19 2008-02-28 Ngk Insulators, Ltd. Electrostatic chuck heater
EP2203028A1 (en) * 2008-12-26 2010-06-30 Omron Co., Ltd. Wiring structure, heater driving device, measuring device, and control system
US20110092072A1 (en) * 2009-10-21 2011-04-21 Lam Research Corporation Heating plate with planar heating zones for semiconductor processing

Also Published As

Publication number Publication date
AU2015203195B2 (en) 2017-04-13
AU2017204549A1 (en) 2017-07-20
AU2015203195A1 (en) 2015-07-09

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