AU2017204549B2 - System and method for controlling a thermal array - Google Patents
System and method for controlling a thermal array Download PDFInfo
- Publication number
- AU2017204549B2 AU2017204549B2 AU2017204549A AU2017204549A AU2017204549B2 AU 2017204549 B2 AU2017204549 B2 AU 2017204549B2 AU 2017204549 A AU2017204549 A AU 2017204549A AU 2017204549 A AU2017204549 A AU 2017204549A AU 2017204549 B2 AU2017204549 B2 AU 2017204549B2
- Authority
- AU
- Australia
- Prior art keywords
- thermal element
- calculate
- setpoints
- controlling
- thermal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Landscapes
- Control Of Resistance Heating (AREA)
- User Interface Of Digital Computer (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Control Of Electric Motors In General (AREA)
Abstract
A system and method is provided. The system and method calculate target setpoints for each thermal element and index through each thermal element to provide power to the thermal element, sense an electrical characteristic of the thermal element, and determine if the thermal element exceeds a target setpoint for the thermal element based on the sensed electrical characteristic. WO 2013/033332 PCT/US2012/053049 Control 61 Calculate -/-612 Setpoints Calculate Time Windows 614 For Each Thermal Element Is End Of Yes Time w Increment To Window Next Thermal Element 62 No A Power and Measure Thermal Element Characteristics Post thermalYe Element Setpoint Based on Measured Characteristics 628 630 No FIG. 6a
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2017204549A AU2017204549B2 (en) | 2011-08-30 | 2017-07-03 | System and method for controlling a thermal array |
Applications Claiming Priority (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161528939P | 2011-08-30 | 2011-08-30 | |
US61/528,939 | 2011-08-30 | ||
US201261635310P | 2012-04-19 | 2012-04-19 | |
US61/635,310 | 2012-04-19 | ||
PCT/US2012/053049 WO2013033332A1 (en) | 2011-08-30 | 2012-08-30 | System and method for controlling a thermal array |
AU2012301936A AU2012301936A1 (en) | 2011-08-30 | 2012-08-30 | System and method for controlling a thermal array |
AU2015203195A AU2015203195B2 (en) | 2011-08-30 | 2015-06-15 | System and method for controlling a thermal array |
AU2017204549A AU2017204549B2 (en) | 2011-08-30 | 2017-07-03 | System and method for controlling a thermal array |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2015203195A Division AU2015203195B2 (en) | 2011-08-30 | 2015-06-15 | System and method for controlling a thermal array |
Publications (2)
Publication Number | Publication Date |
---|---|
AU2017204549A1 AU2017204549A1 (en) | 2017-07-20 |
AU2017204549B2 true AU2017204549B2 (en) | 2020-01-30 |
Family
ID=53626517
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2015203195A Ceased AU2015203195B2 (en) | 2011-08-30 | 2015-06-15 | System and method for controlling a thermal array |
AU2017204549A Ceased AU2017204549B2 (en) | 2011-08-30 | 2017-07-03 | System and method for controlling a thermal array |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2015203195A Ceased AU2015203195B2 (en) | 2011-08-30 | 2015-06-15 | System and method for controlling a thermal array |
Country Status (1)
Country | Link |
---|---|
AU (2) | AU2015203195B2 (en) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060144516A1 (en) * | 2004-12-30 | 2006-07-06 | Lam Research Inc., A Delaware Corporation | Apparatus for spatial and temporal control of temperature on a substrate |
US20080047952A1 (en) * | 2006-07-19 | 2008-02-28 | Ngk Insulators, Ltd. | Electrostatic chuck heater |
EP2203028A1 (en) * | 2008-12-26 | 2010-06-30 | Omron Co., Ltd. | Wiring structure, heater driving device, measuring device, and control system |
US20110092072A1 (en) * | 2009-10-21 | 2011-04-21 | Lam Research Corporation | Heating plate with planar heating zones for semiconductor processing |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3752956A (en) * | 1972-05-03 | 1973-08-14 | Du Pont | Electrical resistance heating control circuit |
-
2015
- 2015-06-15 AU AU2015203195A patent/AU2015203195B2/en not_active Ceased
-
2017
- 2017-07-03 AU AU2017204549A patent/AU2017204549B2/en not_active Ceased
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060144516A1 (en) * | 2004-12-30 | 2006-07-06 | Lam Research Inc., A Delaware Corporation | Apparatus for spatial and temporal control of temperature on a substrate |
US20080047952A1 (en) * | 2006-07-19 | 2008-02-28 | Ngk Insulators, Ltd. | Electrostatic chuck heater |
EP2203028A1 (en) * | 2008-12-26 | 2010-06-30 | Omron Co., Ltd. | Wiring structure, heater driving device, measuring device, and control system |
US20110092072A1 (en) * | 2009-10-21 | 2011-04-21 | Lam Research Corporation | Heating plate with planar heating zones for semiconductor processing |
Also Published As
Publication number | Publication date |
---|---|
AU2015203195B2 (en) | 2017-04-13 |
AU2017204549A1 (en) | 2017-07-20 |
AU2015203195A1 (en) | 2015-07-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FGA | Letters patent sealed or granted (standard patent) | ||
MK14 | Patent ceased section 143(a) (annual fees not paid) or expired |