AU2015903047A0 - Chambers for microwave plasma generation - Google Patents
Chambers for microwave plasma generationInfo
- Publication number
- AU2015903047A0 AU2015903047A0 AU2015903047A AU2015903047A AU2015903047A0 AU 2015903047 A0 AU2015903047 A0 AU 2015903047A0 AU 2015903047 A AU2015903047 A AU 2015903047A AU 2015903047 A AU2015903047 A AU 2015903047A AU 2015903047 A0 AU2015903047 A0 AU 2015903047A0
- Authority
- AU
- Australia
- Prior art keywords
- chambers
- plasma generation
- microwave plasma
- microwave
- generation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 210000002381 Plasma Anatomy 0.000 title 1
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/749,430 US10327321B2 (en) | 2015-07-31 | 2016-07-20 | Chambers for microwave plasma generation |
PCT/IB2016/054300 WO2017021808A1 (en) | 2015-07-31 | 2016-07-20 | Chambers for microwave plasma generation |
CN201680044385.9A CN107926107B (en) | 2015-07-31 | 2016-07-20 | Microwave plasma generating chamber |
EP16832383.0A EP3329748B1 (en) | 2015-07-31 | 2016-07-20 | Chambers for microwave plasma generation and related methods |
JP2018502377A JP6732006B2 (en) | 2015-07-31 | 2016-07-20 | Microwave plasma generation chamber and plasma generation method |
AU2016304411A AU2016304411B2 (en) | 2015-07-31 | 2016-07-20 | Chambers for microwave plasma generation |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2015903047A0 true AU2015903047A0 (en) | 2015-08-13 |
Family
ID=
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