AU2015903047A0 - Chambers for microwave plasma generation - Google Patents

Chambers for microwave plasma generation

Info

Publication number
AU2015903047A0
AU2015903047A0 AU2015903047A AU2015903047A AU2015903047A0 AU 2015903047 A0 AU2015903047 A0 AU 2015903047A0 AU 2015903047 A AU2015903047 A AU 2015903047A AU 2015903047 A AU2015903047 A AU 2015903047A AU 2015903047 A0 AU2015903047 A0 AU 2015903047A0
Authority
AU
Australia
Prior art keywords
chambers
plasma generation
microwave plasma
microwave
generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2015903047A
Inventor
Mike Hammer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of AU2015903047A0 publication Critical patent/AU2015903047A0/en
Priority to US15/749,430 priority Critical patent/US10327321B2/en
Priority to PCT/IB2016/054300 priority patent/WO2017021808A1/en
Priority to CN201680044385.9A priority patent/CN107926107B/en
Priority to EP16832383.0A priority patent/EP3329748B1/en
Priority to JP2018502377A priority patent/JP6732006B2/en
Priority to AU2016304411A priority patent/AU2016304411B2/en
Abandoned legal-status Critical Current

Links

AU2015903047A 2015-07-31 2015-07-31 Chambers for microwave plasma generation Abandoned AU2015903047A0 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
US15/749,430 US10327321B2 (en) 2015-07-31 2016-07-20 Chambers for microwave plasma generation
PCT/IB2016/054300 WO2017021808A1 (en) 2015-07-31 2016-07-20 Chambers for microwave plasma generation
CN201680044385.9A CN107926107B (en) 2015-07-31 2016-07-20 Microwave plasma generating chamber
EP16832383.0A EP3329748B1 (en) 2015-07-31 2016-07-20 Chambers for microwave plasma generation and related methods
JP2018502377A JP6732006B2 (en) 2015-07-31 2016-07-20 Microwave plasma generation chamber and plasma generation method
AU2016304411A AU2016304411B2 (en) 2015-07-31 2016-07-20 Chambers for microwave plasma generation

Publications (1)

Publication Number Publication Date
AU2015903047A0 true AU2015903047A0 (en) 2015-08-13

Family

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