AU2015902363A0 - Silicon film and process for forming silicon film - Google Patents

Silicon film and process for forming silicon film

Info

Publication number
AU2015902363A0
AU2015902363A0 AU2015902363A AU2015902363A AU2015902363A0 AU 2015902363 A0 AU2015902363 A0 AU 2015902363A0 AU 2015902363 A AU2015902363 A AU 2015902363A AU 2015902363 A AU2015902363 A AU 2015902363A AU 2015902363 A0 AU2015902363 A0 AU 2015902363A0
Authority
AU
Australia
Prior art keywords
silicon film
forming
forming silicon
film
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2015902363A
Inventor
Chee Yee Kwok
Aron Michael
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NewSouth Innovations Pty Ltd
Original Assignee
NewSouth Innovations Pty Ltd
Filing date
Publication date
Application filed by NewSouth Innovations Pty Ltd filed Critical NewSouth Innovations Pty Ltd
Publication of AU2015902363A0 publication Critical patent/AU2015902363A0/en
Priority to PCT/AU2016/050520 priority Critical patent/WO2016201526A1/en
Abandoned legal-status Critical Current

Links

AU2015902363A 2015-06-19 2015-06-19 Silicon film and process for forming silicon film Abandoned AU2015902363A0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/AU2016/050520 WO2016201526A1 (en) 2015-06-19 2016-06-20 Silicon film and process for forming silicon film

Publications (1)

Publication Number Publication Date
AU2015902363A0 true AU2015902363A0 (en) 2015-07-09

Family

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