AU2015901600A0 - Microelectromechanical Systems (MEMS) And Methods - Google Patents

Microelectromechanical Systems (MEMS) And Methods

Info

Publication number
AU2015901600A0
AU2015901600A0 AU2015901600A AU2015901600A AU2015901600A0 AU 2015901600 A0 AU2015901600 A0 AU 2015901600A0 AU 2015901600 A AU2015901600 A AU 2015901600A AU 2015901600 A AU2015901600 A AU 2015901600A AU 2015901600 A0 AU2015901600 A0 AU 2015901600A0
Authority
AU
Australia
Prior art keywords
mems
methods
microelectromechanical systems
microelectromechanical
systems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2015901600A
Inventor
Jarek Antoszewski
John Bumgarner
Lorenzo Faraone
Mariusz Martyniuk
Delusha Silva
Dhirendra TRIPATHI
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Western Australia
Original Assignee
University of Western Australia
Filing date
Publication date
Application filed by University of Western Australia filed Critical University of Western Australia
Publication of AU2015901600A0 publication Critical patent/AU2015901600A0/en
Priority to PCT/AU2016/050326 priority Critical patent/WO2016176735A1/en
Priority to US15/571,790 priority patent/US10850974B2/en
Priority to AU2016257777A priority patent/AU2016257777B2/en
Priority to EP16788961.7A priority patent/EP3292078A4/en
Abandoned legal-status Critical Current

Links

AU2015901600A 2015-05-05 2015-05-05 Microelectromechanical Systems (MEMS) And Methods Abandoned AU2015901600A0 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
PCT/AU2016/050326 WO2016176735A1 (en) 2015-05-05 2016-05-05 Microelectromechanical systems (mems) and methods
US15/571,790 US10850974B2 (en) 2015-05-05 2016-05-05 Microelectromechanical systems (MEMS) and methods
AU2016257777A AU2016257777B2 (en) 2015-05-05 2016-05-05 Microelectromechanical systems (MEMS) and methods
EP16788961.7A EP3292078A4 (en) 2015-05-05 2016-05-05 Microelectromechanical systems (mems) and methods

Publications (1)

Publication Number Publication Date
AU2015901600A0 true AU2015901600A0 (en) 2015-05-21

Family

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