AU2009900652A0 - Method and apparatus for characterising a film on a substrate - Google Patents

Method and apparatus for characterising a film on a substrate

Info

Publication number
AU2009900652A0
AU2009900652A0 AU2009900652A AU2009900652A AU2009900652A0 AU 2009900652 A0 AU2009900652 A0 AU 2009900652A0 AU 2009900652 A AU2009900652 A AU 2009900652A AU 2009900652 A AU2009900652 A AU 2009900652A AU 2009900652 A0 AU2009900652 A0 AU 2009900652A0
Authority
AU
Australia
Prior art keywords
characterising
substrate
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2009900652A
Inventor
Kamal Alameh
Mikhail Vasiliev
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edith Cowan University
Original Assignee
Edith Cowan University
Filing date
Publication date
Application filed by Edith Cowan University filed Critical Edith Cowan University
Publication of AU2009900652A0 publication Critical patent/AU2009900652A0/en
Abandoned legal-status Critical Current

Links

AU2009900652A 2009-02-16 Method and apparatus for characterising a film on a substrate Abandoned AU2009900652A0 (en)

Publications (1)

Publication Number Publication Date
AU2009900652A0 true AU2009900652A0 (en) 2009-03-05

Family

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