AU2008903289A0 - Method for patterned etching of selected material - Google Patents

Method for patterned etching of selected material

Info

Publication number
AU2008903289A0
AU2008903289A0 AU2008903289A AU2008903289A AU2008903289A0 AU 2008903289 A0 AU2008903289 A0 AU 2008903289A0 AU 2008903289 A AU2008903289 A AU 2008903289A AU 2008903289 A AU2008903289 A AU 2008903289A AU 2008903289 A0 AU2008903289 A0 AU 2008903289A0
Authority
AU
Australia
Prior art keywords
selected material
patterned etching
patterned
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2008903289A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NewSouth Innovations Pty Ltd
Original Assignee
NewSouth Innovations Pty Ltd
Filing date
Publication date
Application filed by NewSouth Innovations Pty Ltd filed Critical NewSouth Innovations Pty Ltd
Publication of AU2008903289A0 publication Critical patent/AU2008903289A0/en
Priority to AU2009208384A priority Critical patent/AU2009208384A1/en
Priority to CN2009801115599A priority patent/CN101990705A/en
Priority to JP2010544535A priority patent/JP5242703B2/en
Priority to EP09706758A priority patent/EP2245655A4/en
Priority to KR1020107019558A priority patent/KR20110020760A/en
Priority to PCT/AU2009/000098 priority patent/WO2009094711A1/en
Priority to TW098103223A priority patent/TW200947555A/en
Priority to US12/847,061 priority patent/US8273659B2/en
Abandoned legal-status Critical Current

Links

AU2008903289A 2008-02-01 2008-06-27 Method for patterned etching of selected material Abandoned AU2008903289A0 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
AU2009208384A AU2009208384A1 (en) 2008-02-01 2009-01-29 Method for patterned etching of selected material
CN2009801115599A CN101990705A (en) 2008-02-01 2009-01-29 Method for patterned etching of selected material
JP2010544535A JP5242703B2 (en) 2008-02-01 2009-01-29 Patterned etching of selected materials
EP09706758A EP2245655A4 (en) 2008-02-01 2009-01-29 Method for patterned etching of selected material
KR1020107019558A KR20110020760A (en) 2008-02-01 2009-01-29 Method for patterned etching of selected material
PCT/AU2009/000098 WO2009094711A1 (en) 2008-02-01 2009-01-29 Method for patterned etching of selected material
TW098103223A TW200947555A (en) 2008-02-01 2009-02-02 Method for patterned etching of selected material
US12/847,061 US8273659B2 (en) 2008-02-01 2010-07-30 Method for patterned etching of selected material

Publications (1)

Publication Number Publication Date
AU2008903289A0 true AU2008903289A0 (en) 2008-07-17

Family

ID=

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