AU2003295133A1 - Deformable-mirror cooling - Google Patents
Deformable-mirror coolingInfo
- Publication number
- AU2003295133A1 AU2003295133A1 AU2003295133A AU2003295133A AU2003295133A1 AU 2003295133 A1 AU2003295133 A1 AU 2003295133A1 AU 2003295133 A AU2003295133 A AU 2003295133A AU 2003295133 A AU2003295133 A AU 2003295133A AU 2003295133 A1 AU2003295133 A1 AU 2003295133A1
- Authority
- AU
- Australia
- Prior art keywords
- deformable
- mirror cooling
- mirror
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
- G02B7/1815—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Elements Other Than Lenses (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0230038A GB0230038D0 (en) | 2002-12-23 | 2002-12-23 | Deformable-mirror holder |
GB0230040A GB0230040D0 (en) | 2002-12-23 | 2002-12-23 | Deformable-mirror cooling |
GB0230038.2 | 2002-12-23 | ||
GB0230040.8 | 2002-12-23 | ||
GB0310421A GB0310421D0 (en) | 2002-12-23 | 2003-04-30 | Deformable-mirror cooling |
GB0310421.3 | 2003-04-30 | ||
PCT/GB2003/005530 WO2004057408A2 (fr) | 2002-12-23 | 2003-12-18 | Miroir deformable equipe d'un circuit de refroidissement |
Publications (2)
Publication Number | Publication Date |
---|---|
AU2003295133A1 true AU2003295133A1 (en) | 2004-07-14 |
AU2003295133A8 AU2003295133A8 (en) | 2004-07-14 |
Family
ID=32685760
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2003295133A Abandoned AU2003295133A1 (en) | 2002-12-23 | 2003-12-18 | Deformable-mirror cooling |
Country Status (2)
Country | Link |
---|---|
AU (1) | AU2003295133A1 (fr) |
WO (1) | WO2004057408A2 (fr) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007038872A1 (de) * | 2007-08-16 | 2009-02-26 | Seereal Technologies S.A. | Abbildungsvorrichtung zum Beeinflussen von auftreffendem Licht |
EP2189832A1 (fr) * | 2008-11-20 | 2010-05-26 | BAE Systems PLC | Suspension de miroir déformable |
EP2353043A1 (fr) | 2008-11-20 | 2011-08-10 | BAE Systems PLC | Suspension pour miroir déformable |
CN109656015B (zh) * | 2019-01-25 | 2021-04-13 | 中国工程物理研究院激光聚变研究中心 | 一种提高光学系统波前畸变校正精度的方法 |
FR3096511B1 (fr) | 2019-05-22 | 2021-07-02 | Amplitude Systemes | Monture de composant optique et système de commande de faisceau lumineux associé |
DE102020210026A1 (de) * | 2020-08-07 | 2022-02-10 | Carl Zeiss Smt Gmbh | Projektionsbelichtungsanlage mit Temperiervorrichtung |
DE102022203395A1 (de) | 2022-04-06 | 2023-04-06 | Carl Zeiss Smt Gmbh | EUV-Spiegel, optisches System, sowie Verfahren zum Betreiben eines optischen Systems |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4657358A (en) * | 1985-08-23 | 1987-04-14 | Itek Corporation | Cooled deformable mirror |
US5037190A (en) * | 1990-07-27 | 1991-08-06 | Litton Systems, Inc. | Fusible link actuators for deformable mirrors |
US5535043A (en) * | 1994-08-22 | 1996-07-09 | Hughes Aircraft Company | Replaceable actuator assembly for optical mirror with kinematic mount |
-
2003
- 2003-12-18 WO PCT/GB2003/005530 patent/WO2004057408A2/fr not_active Application Discontinuation
- 2003-12-18 AU AU2003295133A patent/AU2003295133A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO2004057408A3 (fr) | 2004-11-11 |
AU2003295133A8 (en) | 2004-07-14 |
WO2004057408A2 (fr) | 2004-07-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
AU2002238861A1 (en) | Refrigerator | |
AU2003235312A1 (en) | Refrigerator | |
AU2003291995A1 (en) | Cooling device | |
EP1394485A3 (fr) | Réfrigérateur | |
AU2003239909A1 (en) | Enhanced-service provision | |
AU2002335152A1 (en) | Robot-phone | |
AU2002953193A0 (en) | Cooling helmet | |
AU2003288566A1 (en) | Deformable-mirror cooling | |
AU2003286949A1 (en) | Refrigerator | |
AU2003295133A1 (en) | Deformable-mirror cooling | |
AU2002367810A1 (en) | Bis-transition-metal-chelate-probes | |
AU2003260327A1 (en) | Refrigerator | |
AU2002318053A1 (en) | Suplier | |
AU2002341221A1 (en) | Honey-brandy | |
AU2002348964A1 (en) | Snowbike | |
AU2003228146A1 (en) | Cooling device | |
AU2002344387A1 (en) | Multifunction-pillow | |
AUPS008102A0 (en) | Cooling means | |
AU2003270207A1 (en) | Cooling method | |
AUPS217202A0 (en) | Cooling devices | |
AU2002100026A4 (en) | Disc400 | |
AU2002100468A4 (en) | Flexi-edger | |
AU2002100747A4 (en) | Powersell | |
AU2002100541A4 (en) | Backmate | |
AU2002100031A4 (en) | earliPay |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |