AU2003288487A1 - A sample enclosure for a scanning electron microscope and methods of use thereof - Google Patents

A sample enclosure for a scanning electron microscope and methods of use thereof

Info

Publication number
AU2003288487A1
AU2003288487A1 AU2003288487A AU2003288487A AU2003288487A1 AU 2003288487 A1 AU2003288487 A1 AU 2003288487A1 AU 2003288487 A AU2003288487 A AU 2003288487A AU 2003288487 A AU2003288487 A AU 2003288487A AU 2003288487 A1 AU2003288487 A1 AU 2003288487A1
Authority
AU
Australia
Prior art keywords
methods
electron microscope
scanning electron
sample enclosure
enclosure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003288487A
Inventor
Opher Gileadi
Amotz Nechushtan
David Sprinzak
Ory Zik
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Quantomix Ltd
Original Assignee
Quantomix Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/IL2003/000457 external-priority patent/WO2003104848A2/en
Application filed by Quantomix Ltd filed Critical Quantomix Ltd
Publication of AU2003288487A1 publication Critical patent/AU2003288487A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2002—Controlling environment of sample
    • H01J2237/2003—Environmental cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2803—Scanning microscopes characterised by the imaging method
    • H01J2237/2808—Cathodoluminescence
AU2003288487A 2003-02-20 2003-12-10 A sample enclosure for a scanning electron microscope and methods of use thereof Abandoned AU2003288487A1 (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US44880803P 2003-02-20 2003-02-20
US60/448,808 2003-02-20
PCT/IL2003/000457 WO2003104848A2 (en) 2002-06-05 2003-06-01 Methods for sem inspection of fluid containing samples
AU2003228092 2003-06-01
AU2003231893 2003-06-01
PCT/IL2003/000454 WO2003104846A2 (en) 2002-06-05 2003-06-01 A sample enclosure for a scanning electron microscope and methods of use thereof
PCT/IL2003/001054 WO2004075209A1 (en) 2003-02-20 2003-12-10 A sample enclosure for a scanning electron microscope and methods of use thereof

Publications (1)

Publication Number Publication Date
AU2003288487A1 true AU2003288487A1 (en) 2004-09-09

Family

ID=32912689

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003288487A Abandoned AU2003288487A1 (en) 2003-02-20 2003-12-10 A sample enclosure for a scanning electron microscope and methods of use thereof

Country Status (3)

Country Link
EP (1) EP1595265A1 (en)
AU (1) AU2003288487A1 (en)
WO (1) WO2004075209A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2003231893A1 (en) 2002-06-05 2003-12-22 Quantomix Ltd. A sample enclosure for a scanning electron microscope and methods of use thereof
IL150056A0 (en) 2002-06-05 2002-12-01 Yeda Res & Dev Low-pressure chamber for scanning electron microscopy in a wet environment
EP2565900B1 (en) 2007-11-13 2016-02-03 Carl Zeiss Microscopy Limited Beam device and system comprising a particle beam device and an optical microscope

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3858049A (en) * 1973-09-17 1974-12-31 Etec Corp Method and apparatus for sem specimen coating and transfer
US4705949A (en) * 1985-11-25 1987-11-10 The United States Of America As Represented By The Secretary Of Commerce Method and apparatus relating to specimen cells for scanning electron microscopes

Also Published As

Publication number Publication date
WO2004075209A1 (en) 2004-09-02
EP1595265A1 (en) 2005-11-16

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase