AU2003278808A1 - Sensor system and methods used to detect material wear and surface deterioration - Google Patents

Sensor system and methods used to detect material wear and surface deterioration

Info

Publication number
AU2003278808A1
AU2003278808A1 AU2003278808A AU2003278808A AU2003278808A1 AU 2003278808 A1 AU2003278808 A1 AU 2003278808A1 AU 2003278808 A AU2003278808 A AU 2003278808A AU 2003278808 A AU2003278808 A AU 2003278808A AU 2003278808 A1 AU2003278808 A1 AU 2003278808A1
Authority
AU
Australia
Prior art keywords
sensor system
methods used
material wear
surface deterioration
detect material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003278808A
Inventor
Ulrich Bonne
Susanne Grabmeier
John Mosher
Philip Poblano
Susan Strothers
Michael Thomas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of AU2003278808A1 publication Critical patent/AU2003278808A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3476—Testing and control
    • H01J37/3479—Detecting exhaustion of target material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
AU2003278808A 2002-09-12 2003-09-12 Sensor system and methods used to detect material wear and surface deterioration Abandoned AU2003278808A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US41054002P 2002-09-12 2002-09-12
US60/410,540 2002-09-12
PCT/US2003/028832 WO2004024979A1 (en) 2002-09-12 2003-09-12 Sensor system and methods used to detect material wear and surface deterioration

Publications (1)

Publication Number Publication Date
AU2003278808A1 true AU2003278808A1 (en) 2004-04-30

Family

ID=31994153

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003278808A Abandoned AU2003278808A1 (en) 2002-09-12 2003-09-12 Sensor system and methods used to detect material wear and surface deterioration

Country Status (3)

Country Link
AU (1) AU2003278808A1 (en)
TW (1) TW200419139A (en)
WO (1) WO2004024979A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7566384B2 (en) 2005-07-22 2009-07-28 Praxair Technology, Inc. System and apparatus for real-time monitoring and control of sputter target erosion
US8702919B2 (en) 2007-08-13 2014-04-22 Honeywell International Inc. Target designs and related methods for coupled target assemblies, methods of production and uses thereof
US11244815B2 (en) 2017-04-20 2022-02-08 Honeywell International Inc. Profiled sputtering target and method of making the same

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4500409A (en) * 1983-07-19 1985-02-19 Varian Associates, Inc. Magnetron sputter coating source for both magnetic and non magnetic target materials
DE3630737C1 (en) * 1986-09-10 1987-11-05 Philips & Du Pont Optical Cathode sputtering device with a device for measuring a critical target removal
CH669609A5 (en) * 1986-12-23 1989-03-31 Balzers Hochvakuum
EP0417221A1 (en) * 1989-03-15 1991-03-20 Balzers Aktiengesellschaft Process for detecting the attainment of a predetermined depth in target body erosion and target body therefor
JP2953940B2 (en) * 1994-02-14 1999-09-27 日本電気株式会社 Sputtering apparatus and method for measuring sputter surface of target
JPH07292472A (en) * 1994-04-21 1995-11-07 Sharp Corp Method for detecting amount of target to be reduced in sputtering device and its device

Also Published As

Publication number Publication date
WO2004024979B1 (en) 2004-05-27
WO2004024979A1 (en) 2004-03-25
TW200419139A (en) 2004-10-01
WO2004024979A9 (en) 2004-07-15

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase