AU2003277939A1 - Method for determining physical or chemical parameters of a thin material layer - Google Patents

Method for determining physical or chemical parameters of a thin material layer

Info

Publication number
AU2003277939A1
AU2003277939A1 AU2003277939A AU2003277939A AU2003277939A1 AU 2003277939 A1 AU2003277939 A1 AU 2003277939A1 AU 2003277939 A AU2003277939 A AU 2003277939A AU 2003277939 A AU2003277939 A AU 2003277939A AU 2003277939 A1 AU2003277939 A1 AU 2003277939A1
Authority
AU
Australia
Prior art keywords
material layer
thin material
chemical parameters
determining physical
physical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003277939A
Other languages
English (en)
Inventor
Peter Krempl
Ferdinand Krispel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AVL List GmbH
Original Assignee
AVL List GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AVL List GmbH filed Critical AVL List GmbH
Publication of AU2003277939A1 publication Critical patent/AU2003277939A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/032—Analysing fluids by measuring attenuation of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
    • G01N11/10—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material
    • G01N11/16—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material by measuring damping effect upon oscillatory body
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N9/00—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity
    • G01N9/002—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity using variation of the resonant frequency of an element vibrating in contact with the material submitted to analysis
AU2003277939A 2002-11-07 2003-11-06 Method for determining physical or chemical parameters of a thin material layer Abandoned AU2003277939A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
AT16742002A AT414274B (de) 2002-11-07 2002-11-07 Verfahren zur bestimmung physikalischer oder chemischer parameter einer dünnen materialschicht
ATA1674/2002 2002-11-07
PCT/AT2003/000334 WO2004042370A1 (de) 2002-11-07 2003-11-06 Verfahren zur bestimmung physikalischer oder chemischer parameter einer dünnen materialschicht

Publications (1)

Publication Number Publication Date
AU2003277939A1 true AU2003277939A1 (en) 2004-06-07

Family

ID=32303950

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003277939A Abandoned AU2003277939A1 (en) 2002-11-07 2003-11-06 Method for determining physical or chemical parameters of a thin material layer

Country Status (3)

Country Link
AT (1) AT414274B (de)
AU (1) AU2003277939A1 (de)
WO (1) WO2004042370A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4249502B2 (ja) * 2003-02-04 2009-04-02 日本電波工業株式会社 圧電結晶材料及び圧電振動子

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4783987A (en) * 1987-02-10 1988-11-15 The Board Of Regents Of The University Of Washington System for sustaining and monitoring the oscillation of piezoelectric elements exposed to energy-absorptive media
US4788466A (en) * 1987-11-09 1988-11-29 University Of Arkansas Piezoelectric sensor Q-loss compensation
SE504199C2 (sv) * 1995-05-04 1996-12-02 Bengt Kasemo Anordning vid mätning av resonansfrekvens och/eller dissipationsfaktor hos en piezoelektrisk kristallmikrovåg
SE9701007L (sv) * 1997-03-17 1998-09-18 Michael Rodahl Förfarande vid en piezoelektrisk kristallmikrovågsmätning
GB9823410D0 (en) * 1998-10-26 1998-12-23 Smithkline Beecham Plc Novel device
WO2000026636A1 (fr) * 1998-11-02 2000-05-11 Kabushiki Kaisha Meidensha Capteur qcm
SE9900996D0 (sv) * 1999-03-17 1999-03-17 Sense Ab Q Metod for studying chemical-physical properties of a polymer

Also Published As

Publication number Publication date
AT414274B (de) 2006-10-15
ATA16742002A (de) 2006-01-15
WO2004042370A1 (de) 2004-05-21

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase