AU2003267330A1 - Capacitive pressure sensor - Google Patents

Capacitive pressure sensor

Info

Publication number
AU2003267330A1
AU2003267330A1 AU2003267330A AU2003267330A AU2003267330A1 AU 2003267330 A1 AU2003267330 A1 AU 2003267330A1 AU 2003267330 A AU2003267330 A AU 2003267330A AU 2003267330 A AU2003267330 A AU 2003267330A AU 2003267330 A1 AU2003267330 A1 AU 2003267330A1
Authority
AU
Australia
Prior art keywords
thickness
diameter
pressure sensor
measurement cell
support ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003267330A
Inventor
Ulfert Drewes
Igor Getman
Frank Hegner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser SE and Co KG
Original Assignee
Endress and Hauser SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress and Hauser SE and Co KG filed Critical Endress and Hauser SE and Co KG
Publication of AU2003267330A1 publication Critical patent/AU2003267330A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

Capacitive pressure sensor has a pressure measurement cell with a cylindrical base body with a first diameter and a first thickness, a measurement membrane of the front surface of the base body with a second diameter and thickness, an elastic sealing ring with third diameter and thickness and a support ring with fourth diameter and thickness. The pressure measurement cell is clamped between the sealing ring and the support ring using a clamping ring. The dimensions of the components are such that axial tensioning and radial deformation of the measurement cell are minimized. An Independent claim is made for a method for iterative optimization of the dimensions of a support ring and a decoupling element for the pressure sensor based on use of finite element techniques.
AU2003267330A 2002-09-16 2003-09-09 Capacitive pressure sensor Abandoned AU2003267330A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10243079A DE10243079A1 (en) 2002-09-16 2002-09-16 Capacitive pressure sensor has its dimensions optimized using an iterative numerical method so that errors caused by tensioning forces and temperature hysteresis are minimized
DE10243079.9 2002-09-16
PCT/EP2003/010009 WO2004031716A1 (en) 2002-09-16 2003-09-09 Capacitive pressure sensor

Publications (1)

Publication Number Publication Date
AU2003267330A1 true AU2003267330A1 (en) 2004-04-23

Family

ID=31896094

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003267330A Abandoned AU2003267330A1 (en) 2002-09-16 2003-09-09 Capacitive pressure sensor

Country Status (8)

Country Link
EP (1) EP1540293B1 (en)
JP (1) JP4147222B2 (en)
CN (1) CN100353154C (en)
AT (1) ATE433566T1 (en)
AU (1) AU2003267330A1 (en)
DE (2) DE10243079A1 (en)
RU (1) RU2301411C2 (en)
WO (1) WO2004031716A1 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2106292T3 (en) * 1993-11-30 1997-11-01 Alcan Int Ltd PROCEDURE AND APPARATUS FOR DRYING SOLID MATERIAL CARRIED BY LIQUID.
DE102004031582A1 (en) 2004-06-29 2006-02-09 Endress + Hauser Gmbh + Co. Kg Duckaufnehmer
CN100485336C (en) * 2004-09-29 2009-05-06 罗斯蒙德公司 Pressure transducer with improved process adapter
CH702915A1 (en) * 2010-03-18 2011-09-30 Kistler Holding Ag SENSOR WITH strain decoupled EINSPANNUNGSVORRICHTUNG.
CN102141455B (en) * 2010-12-10 2014-06-25 北京航空航天大学 Non-intrusive pressure measurement method
DE102010063065A1 (en) * 2010-12-14 2012-06-14 Endress + Hauser Gmbh + Co. Kg Pressure sensor and method for its manufacture +
DE102010061322A1 (en) 2010-12-17 2012-06-21 Turck Holding Gmbh Pressure sensor has cup-shaped depression that is formed from the bottom of diaphragm to front side of measuring cell to form monolithic structure such that front side edge of depression is supported on sealing ring
DE102011005705B4 (en) * 2011-03-17 2014-07-03 Ifm Electronic Gmbh Capacitive pressure sensor
DE102011006431A1 (en) 2011-03-30 2012-10-04 Endress + Hauser Gmbh + Co. Kg Ceramic pressure measuring cell of pressure sensor, has capacitor that is provided between the electrodes to affect the measuring diaphragm based on applied pressure
DE102013103028A1 (en) * 2013-03-25 2014-09-25 Endress + Hauser Gmbh + Co. Kg Sintered body with multiple materials and pressure gauge with such a sintered body
DE102013225335A1 (en) 2013-12-10 2014-11-13 Siemens Aktiengesellschaft Pressure transmitter for process instrumentation
CN106461490B (en) * 2014-08-01 2019-06-11 Vega格里沙贝两合公司 Device for pressure measurement and method for manufacturing device for pressure measurement
AU2017250172B2 (en) * 2016-04-11 2021-05-27 The Alfred E. Mann Foundation For Scientific Research Pressure sensors with tensioned membranes
DE102018115290A1 (en) * 2018-06-26 2020-01-02 Endress+Hauser SE+Co. KG Pressure sensor with ceramic pressure measuring cell and media-resistant process seal

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61138135A (en) * 1984-12-10 1986-06-25 Nippon Denso Co Ltd Pressure detector
JPH02311729A (en) * 1989-05-26 1990-12-27 Delphi Co Ltd Thin film type pressure sensor
US5157972A (en) * 1991-03-29 1992-10-27 Rosemount Inc. Pressure sensor with high modules support
JPH05223674A (en) * 1992-02-17 1993-08-31 Yokogawa Electric Corp Differential pressure transmitter
DE4213857C2 (en) * 1992-04-27 1995-10-19 Endress Hauser Gmbh Co Device for measuring pressure and differential pressure
DE4219178C2 (en) * 1992-06-09 1996-04-25 Mannesmann Ag Clamping unit for a pressure sensor
DE4407212C1 (en) * 1992-10-12 1995-08-03 Fibronix Sensoren Gmbh Pressure sensor
DE4416978C2 (en) * 1994-05-13 2000-09-07 Ifm Electronic Gmbh Pressure sensor
EP0757237B1 (en) * 1995-08-01 2002-04-10 Endress + Hauser GmbH + Co. Pressure transducer
US6055864A (en) * 1998-04-14 2000-05-02 Mannesmann Vdo Ag Pressure sensor and method for its production
US6363790B1 (en) * 1998-10-23 2002-04-02 Endress + Hauser Gmbh + Co. Pressure sensor
DE59911611D1 (en) * 1999-12-10 2005-03-17 Endress & Hauser Gmbh & Co Kg pressure monitor

Also Published As

Publication number Publication date
EP1540293B1 (en) 2009-06-10
RU2005111235A (en) 2006-02-10
CN100353154C (en) 2007-12-05
DE10243079A1 (en) 2004-03-25
RU2301411C2 (en) 2007-06-20
JP4147222B2 (en) 2008-09-10
EP1540293A1 (en) 2005-06-15
ATE433566T1 (en) 2009-06-15
JP2005539240A (en) 2005-12-22
DE50311590D1 (en) 2009-07-23
CN1682102A (en) 2005-10-12
WO2004031716A1 (en) 2004-04-15

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase