AU2003261023A1 - Device with foil corrector for electron optical aberrations at low energy - Google Patents

Device with foil corrector for electron optical aberrations at low energy

Info

Publication number
AU2003261023A1
AU2003261023A1 AU2003261023A AU2003261023A AU2003261023A1 AU 2003261023 A1 AU2003261023 A1 AU 2003261023A1 AU 2003261023 A AU2003261023 A AU 2003261023A AU 2003261023 A AU2003261023 A AU 2003261023A AU 2003261023 A1 AU2003261023 A1 AU 2003261023A1
Authority
AU
Australia
Prior art keywords
corrector
foil
low energy
electron optical
optical aberrations
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003261023A
Other versions
AU2003261023A8 (en
Inventor
Pieter Kruit
Rogier Herman Van Aken
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STICHTING FUNDEMENTEEL ONDERZOEK DER MATERIE (FOM)
Technische Universiteit Delft
Original Assignee
Technische Universiteit Delft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technische Universiteit Delft filed Critical Technische Universiteit Delft
Publication of AU2003261023A8 publication Critical patent/AU2003261023A8/en
Publication of AU2003261023A1 publication Critical patent/AU2003261023A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
AU2003261023A 2002-08-30 2003-09-01 Device with foil corrector for electron optical aberrations at low energy Abandoned AU2003261023A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US40701202P 2002-08-30 2002-08-30
US60/407,012 2002-08-30
PCT/NL2003/000612 WO2004021391A1 (en) 2002-08-30 2003-09-01 Device with foil corrector for electron optical aberrations at low energy

Publications (2)

Publication Number Publication Date
AU2003261023A8 AU2003261023A8 (en) 2004-03-19
AU2003261023A1 true AU2003261023A1 (en) 2004-03-19

Family

ID=31978407

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003261023A Abandoned AU2003261023A1 (en) 2002-08-30 2003-09-01 Device with foil corrector for electron optical aberrations at low energy

Country Status (3)

Country Link
EP (1) EP1547119A1 (en)
AU (1) AU2003261023A1 (en)
WO (1) WO2004021391A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2051278B1 (en) * 2007-10-17 2011-09-07 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Energy filter for cold field emission electron beam apparatus
FR3006499B1 (en) 2013-05-31 2016-11-25 Commissariat Energie Atomique ELECTROSTATIC LENS WITH INSULATING OR SEMICONDUCTOR MEMBRANE
JP2016115680A (en) * 2014-12-17 2016-06-23 アプライド マテリアルズ イスラエル リミテッド Scanning charged particle beam device having aberration correction aperture and operation method thereof

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69506375T2 (en) * 1994-10-03 1999-06-17 Koninkl Philips Electronics Nv PARTICLE-OPTICAL DEVICE WITH AN ELECTRON SOURCE PROVIDES A NEEDLE AND A MEMBRANE-LIKE EXTRACTION ELECTRODE

Also Published As

Publication number Publication date
AU2003261023A8 (en) 2004-03-19
WO2004021391A1 (en) 2004-03-11
EP1547119A1 (en) 2005-06-29

Similar Documents

Publication Publication Date Title
AUPR977301A0 (en) An electrode for an energy storage device
AU2003902656A0 (en) Collector for solar radiation
AU2003291594A1 (en) High energy, low energy density, radiation-resistant optics used with micro-electromehanical devices
AU2003240412A1 (en) Device for converting mechanical energy into electrical energy
WO2003062749A8 (en) Schematic generation
AU2002347601A1 (en) Power factor correction device for switching power supplies
AU2003235340A1 (en) Separator for fuel cell
AU2003255736A1 (en) Optical device for high energy radiation
AU2003233736A1 (en) Fuel cell cooling system
AU2003295938A1 (en) Fuel cell stack
AU2003226337A1 (en) Fuel cell power source
AU2003224637A1 (en) High performance fuel cells
AU2003209849A1 (en) An electrolyte for an energy storage device
AU2003289453A1 (en) Separator for nonaqueous electrolyte cell
AU2002328534A1 (en) Ion generator
AU2003235497A1 (en) Running-machine for wind structure
AU2003261023A1 (en) Device with foil corrector for electron optical aberrations at low energy
AU2003287114A1 (en) Alcohol-air fuel cell
AU2003217336A1 (en) Current collectors
EP1547181B8 (en) Fuel cell
AU2002335467A1 (en) Vacuum beaker
AU2003273598A1 (en) Device for receiving solar energy
AU2003296777A1 (en) Wind concentrating device for vertical axis wind turbine
AU2003210525A1 (en) Parallax correction for close focus
AU2002344457A1 (en) Fuel cell coolant

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase