AU2003256917A1 - Low temperature anodic bonding method using focused energy for assembly of micromachined systems - Google Patents
Low temperature anodic bonding method using focused energy for assembly of micromachined systemsInfo
- Publication number
- AU2003256917A1 AU2003256917A1 AU2003256917A AU2003256917A AU2003256917A1 AU 2003256917 A1 AU2003256917 A1 AU 2003256917A1 AU 2003256917 A AU2003256917 A AU 2003256917A AU 2003256917 A AU2003256917 A AU 2003256917A AU 2003256917 A1 AU2003256917 A1 AU 2003256917A1
- Authority
- AU
- Australia
- Prior art keywords
- assembly
- low temperature
- bonding method
- anodic bonding
- focused energy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
- A61K9/00—Medicinal preparations characterised by special physical form
- A61K9/0087—Galenical forms not covered by A61K9/02 - A61K9/7023
- A61K9/0097—Micromachined devices; Microelectromechanical systems [MEMS]; Devices obtained by lithographic treatment of silicon; Devices comprising chips
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
- A61K9/00—Medicinal preparations characterised by special physical form
- A61K9/0002—Galenical forms characterised by the drug release technique; Application systems commanded by energy
- A61K9/0009—Galenical forms characterised by the drug release technique; Application systems commanded by energy involving or responsive to electricity, magnetism or acoustic waves; Galenical aspects of sonophoresis, iontophoresis, electroporation or electroosmosis
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M2205/00—General characteristics of the apparatus
- A61M2205/02—General characteristics of the apparatus characterised by a particular materials
- A61M2205/0244—Micromachined materials, e.g. made from silicon wafers, microelectromechanical systems [MEMS] or comprising nanotechnology
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Medicinal Chemistry (AREA)
- Pharmacology & Pharmacy (AREA)
- Epidemiology (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Dermatology (AREA)
- Engineering & Computer Science (AREA)
- Bioinformatics & Cheminformatics (AREA)
- Micromachines (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/208,309 | 2002-07-30 | ||
US10/208,309 US20040020173A1 (en) | 2002-07-30 | 2002-07-30 | Low temperature anodic bonding method using focused energy for assembly of micromachined systems |
PCT/US2003/023518 WO2004011368A2 (en) | 2002-07-30 | 2003-07-29 | Low temperature anodic bonding method using focused energy for assembly of micromachined systems |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2003256917A1 true AU2003256917A1 (en) | 2004-02-16 |
Family
ID=31186792
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2003256917A Abandoned AU2003256917A1 (en) | 2002-07-30 | 2003-07-29 | Low temperature anodic bonding method using focused energy for assembly of micromachined systems |
Country Status (3)
Country | Link |
---|---|
US (1) | US20040020173A1 (en) |
AU (1) | AU2003256917A1 (en) |
WO (1) | WO2004011368A2 (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2358296A1 (en) * | 1999-01-05 | 2000-07-13 | Anthony P. Adamis | Targeted transscleral controlled release drug delivery to the retina and choroid |
WO2003092665A2 (en) * | 2002-05-02 | 2003-11-13 | Massachusetts Eye And Ear Infirmary | Ocular drug delivery systems and use thereof |
US7176528B2 (en) * | 2003-02-18 | 2007-02-13 | Corning Incorporated | Glass-based SOI structures |
WO2004073551A2 (en) * | 2003-02-18 | 2004-09-02 | Massachusetts Eye And Ear Infirmary | Transscleral drug delivery device and related methods |
US7399681B2 (en) * | 2003-02-18 | 2008-07-15 | Corning Incorporated | Glass-based SOI structures |
CA2584851C (en) * | 2004-11-04 | 2015-04-07 | Microchips, Inc. | Compression and cold weld sealing methods and devices |
US20070264796A1 (en) * | 2006-05-12 | 2007-11-15 | Stocker Mark A | Method for forming a semiconductor on insulator structure |
US9937124B2 (en) * | 2014-09-11 | 2018-04-10 | International Business Machines Corporation | Microchip substance delivery devices having low-power electromechanical release mechanisms |
DE102016107059B4 (en) * | 2015-07-17 | 2022-12-22 | Infineon Technologies Dresden Gmbh | Integrated semiconductor device and manufacturing process |
US10881788B2 (en) | 2015-10-30 | 2021-01-05 | International Business Machines Corporation | Delivery device including reactive material for programmable discrete delivery of a substance |
US10286198B2 (en) | 2016-04-08 | 2019-05-14 | International Business Machines Corporation | Microchip medical substance delivery devices |
US10508755B2 (en) * | 2017-07-21 | 2019-12-17 | International Business Machines Corporation | Fluid delivery device with hydrophobic surface |
NL2021872B1 (en) * | 2018-10-24 | 2020-05-13 | Medspray B V | Spray device and spray nozzle unit |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0539741B1 (en) * | 1991-09-30 | 2003-01-15 | Canon Kabushiki Kaisha | Anodic bonding process with light irradiation |
DE4219132A1 (en) * | 1992-06-11 | 1993-12-16 | Suess Kg Karl | Bonded silicon@ wafer-glass or silicon@-silicon@ joint prodn. - comprises using laser light radiation to initially fix materials at spot(s) and/or lines and conventional high temp. bonding for pressure and acceleration sensors or micro-system elements |
US5366454A (en) * | 1993-03-17 | 1994-11-22 | La Corporation De L'ecole Polytechnique | Implantable medication dispensing device |
JP3188546B2 (en) * | 1993-03-23 | 2001-07-16 | キヤノン株式会社 | Bonded body of insulator and conductor and bonding method |
US5536354A (en) * | 1993-04-23 | 1996-07-16 | Canon Kabushiki Kaisha | Solid phase bonding method |
US5443450A (en) * | 1994-04-29 | 1995-08-22 | Medtronic, Inc. | Medication delivery device and method of construction |
US5938923A (en) * | 1997-04-15 | 1999-08-17 | The Regents Of The University Of California | Microfabricated filter and capsule using a substrate sandwich |
DE10053865C1 (en) * | 2000-10-27 | 2002-04-04 | Inst Physikalische Hochtech Ev | Process for anodically bonding materials with glass components used in microsystems for joining glass with silicon comprises using niobium or tantalum phosphate glass having a specified alkali ion conductivity |
-
2002
- 2002-07-30 US US10/208,309 patent/US20040020173A1/en not_active Abandoned
-
2003
- 2003-07-29 WO PCT/US2003/023518 patent/WO2004011368A2/en not_active Application Discontinuation
- 2003-07-29 AU AU2003256917A patent/AU2003256917A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US20040020173A1 (en) | 2004-02-05 |
WO2004011368A3 (en) | 2004-06-10 |
WO2004011368A2 (en) | 2004-02-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |