AU2003254941A1 - Method for manufacturing semiconductor device - Google Patents
Method for manufacturing semiconductor deviceInfo
- Publication number
- AU2003254941A1 AU2003254941A1 AU2003254941A AU2003254941A AU2003254941A1 AU 2003254941 A1 AU2003254941 A1 AU 2003254941A1 AU 2003254941 A AU2003254941 A AU 2003254941A AU 2003254941 A AU2003254941 A AU 2003254941A AU 2003254941 A1 AU2003254941 A1 AU 2003254941A1
- Authority
- AU
- Australia
- Prior art keywords
- semiconductor device
- manufacturing semiconductor
- manufacturing
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/022—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being a laminate, i.e. composed of sublayers, e.g. stacks of alternating high-k metal oxides
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Formation Of Insulating Films (AREA)
- Chemical Vapour Deposition (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002237551A JP2004079753A (en) | 2002-08-16 | 2002-08-16 | Method of manufacturing semiconductor device |
| JP2002-237551 | 2002-08-16 | ||
| PCT/JP2003/010376 WO2004017397A1 (en) | 2002-08-16 | 2003-08-15 | Method for manufacturing semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AU2003254941A1 true AU2003254941A1 (en) | 2004-03-03 |
Family
ID=31884439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU2003254941A Abandoned AU2003254941A1 (en) | 2002-08-16 | 2003-08-15 | Method for manufacturing semiconductor device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2004079753A (en) |
| AU (1) | AU2003254941A1 (en) |
| TW (1) | TWI235422B (en) |
| WO (1) | WO2004017397A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4283140B2 (en) * | 2004-03-11 | 2009-06-24 | 三井造船株式会社 | Thin film formation method |
| JP2006060170A (en) * | 2004-08-24 | 2006-03-02 | Nec Electronics Corp | Method for manufacturing capacitor and semiconductor device |
| JPWO2007043709A1 (en) | 2005-10-14 | 2009-04-23 | 日本電気株式会社 | Semiconductor device manufacturing method and manufacturing apparatus thereof |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6537613B1 (en) * | 2000-04-10 | 2003-03-25 | Air Products And Chemicals, Inc. | Process for metal metalloid oxides and nitrides with compositional gradients |
| EP1308992A4 (en) * | 2000-08-11 | 2006-01-18 | Tokyo Electron Ltd | Device and method for processing substrate |
-
2002
- 2002-08-16 JP JP2002237551A patent/JP2004079753A/en active Pending
-
2003
- 2003-08-15 WO PCT/JP2003/010376 patent/WO2004017397A1/en active Application Filing
- 2003-08-15 AU AU2003254941A patent/AU2003254941A1/en not_active Abandoned
- 2003-08-15 TW TW092122511A patent/TWI235422B/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TW200409208A (en) | 2004-06-01 |
| TWI235422B (en) | 2005-07-01 |
| WO2004017397A1 (en) | 2004-02-26 |
| JP2004079753A (en) | 2004-03-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |