AU2003252682A1 - Operation fluid movement device - Google Patents

Operation fluid movement device

Info

Publication number
AU2003252682A1
AU2003252682A1 AU2003252682A AU2003252682A AU2003252682A1 AU 2003252682 A1 AU2003252682 A1 AU 2003252682A1 AU 2003252682 A AU2003252682 A AU 2003252682A AU 2003252682 A AU2003252682 A AU 2003252682A AU 2003252682 A1 AU2003252682 A1 AU 2003252682A1
Authority
AU
Australia
Prior art keywords
movement device
fluid movement
operation fluid
movement
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003252682A
Inventor
Yuki Bessho
Masahiro Murasato
Ritsu Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of AU2003252682A1 publication Critical patent/AU2003252682A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H29/004—Operated by deformation of container
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H2029/008—Switches having at least one liquid contact using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H01H2057/006—Micromechanical piezoelectric relay

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Micromachines (AREA)
AU2003252682A 2002-07-26 2003-07-25 Operation fluid movement device Abandoned AU2003252682A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2002218175 2002-07-26
JP2002-218175 2002-07-26
JP2003084485 2003-03-26
JP2003-84485 2003-03-26
PCT/JP2003/009421 WO2004011367A1 (en) 2002-07-26 2003-07-25 Operation fluid movement device

Publications (1)

Publication Number Publication Date
AU2003252682A1 true AU2003252682A1 (en) 2004-02-16

Family

ID=31190305

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003252682A Abandoned AU2003252682A1 (en) 2002-07-26 2003-07-25 Operation fluid movement device

Country Status (2)

Country Link
AU (1) AU2003252682A1 (en)
WO (1) WO2004011367A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7030328B1 (en) * 2004-12-22 2006-04-18 Agilent Technologies, Inc. Liquid metal switch employing micro-electromechanical system (MEMS) structures for actuation

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5211749B2 (en) * 1972-11-18 1977-04-01
SU714533A2 (en) * 1977-09-06 1980-02-05 Московский Ордена Трудового Красного Знамени Инженерно-Физический Институт Switching device
EP1179139B1 (en) * 1999-05-17 2003-08-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Micromechanic pump

Also Published As

Publication number Publication date
WO2004011367A1 (en) 2004-02-05

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase