AU2003250104A1 - Capacitive pressure sensor - Google Patents
Capacitive pressure sensorInfo
- Publication number
- AU2003250104A1 AU2003250104A1 AU2003250104A AU2003250104A AU2003250104A1 AU 2003250104 A1 AU2003250104 A1 AU 2003250104A1 AU 2003250104 A AU2003250104 A AU 2003250104A AU 2003250104 A AU2003250104 A AU 2003250104A AU 2003250104 A1 AU2003250104 A1 AU 2003250104A1
- Authority
- AU
- Australia
- Prior art keywords
- membrane
- electrode
- pressure sensor
- capacitive pressure
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0618—Overload protection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Measuring Fluid Pressure (AREA)
- Invalid Beds And Related Equipment (AREA)
Abstract
Disclosed is a capacitive pressure sensor (1) comprising a base element (10), one side of which is provided with a supporting membrane bed (11) having a concave central area, and a membrane (17) that is connected in a pressure-proof manner to the base element along a joining location, said membrane (17) covering the membrane bed 11. A measuring electrode (13) is disposed in the central area. A reference electrode (14) is arranged in a ditch (12) in order to increase the distance to a counter-electrode (18) on the membrane (17), which makes the reference capacity between the reference electrode and the counter-electrode less sensitive to pressure-related excursions of the membrane (17), resulting in an increased sensitivity of the pressure sensor.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10235046.9 | 2002-07-31 | ||
DE10235046A DE10235046A1 (en) | 2002-07-31 | 2002-07-31 | Capacitive pressure sensor |
PCT/EP2003/007843 WO2004013593A1 (en) | 2002-07-31 | 2003-07-18 | Capacitive pressure sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2003250104A1 true AU2003250104A1 (en) | 2004-02-23 |
Family
ID=30128590
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2003250104A Abandoned AU2003250104A1 (en) | 2002-07-31 | 2003-07-18 | Capacitive pressure sensor |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1537395B1 (en) |
CN (1) | CN100353153C (en) |
AT (1) | ATE319984T1 (en) |
AU (1) | AU2003250104A1 (en) |
DE (2) | DE10235046A1 (en) |
WO (1) | WO2004013593A1 (en) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI119785B (en) * | 2004-09-23 | 2009-03-13 | Vti Technologies Oy | Capacitive sensor and method for making capacitive sensor |
CN101661012B (en) * | 2009-08-11 | 2013-03-13 | 南京理工大学 | Microfilm capacitive type surface stress sensor used for biochemical detection and manufacture method thereof |
DE102009046844A1 (en) * | 2009-11-18 | 2011-05-19 | Endress + Hauser Gmbh + Co. Kg | Capacitive ceramic pressure cell |
DE102010000915A1 (en) * | 2010-01-14 | 2011-07-21 | Endress + Hauser GmbH + Co. KG, 79689 | Capacitive ceramic pressure sensor i.e. absolute pressure sensor, for container opening to measure absolute pressure on measuring membrane, has electrode and counter electrode between which space is formed and smaller than joint thickness |
SG182731A1 (en) * | 2010-02-02 | 2012-08-30 | Mks Instr Inc | Capacitive pressure sensor |
DE102010028773A1 (en) * | 2010-05-07 | 2011-11-10 | Endress + Hauser Gmbh + Co. Kg | Counter bearing with aspherical membrane bed, pressure sensor with such an abutment and method for their preparation |
DE102012111533A1 (en) | 2012-11-28 | 2014-05-28 | Endress + Hauser Gmbh + Co. Kg | Pressure measuring cell |
CN103344381B (en) * | 2013-06-08 | 2016-03-30 | 天津大学 | Wide region vacuum optical fiber sensor with multiple stage rank and preparation method thereof |
DE102014201529A1 (en) * | 2014-01-28 | 2015-07-30 | Siemens Aktiengesellschaft | Method for operating a pressure transmitter and pressure transmitter |
US9410861B2 (en) * | 2014-03-25 | 2016-08-09 | Honeywell International Inc. | Pressure sensor with overpressure protection |
DE102014104506A1 (en) * | 2014-03-31 | 2015-10-01 | Endress + Hauser Gmbh + Co. Kg | pressure sensor |
DE102014108748A1 (en) * | 2014-06-23 | 2015-12-24 | Endress + Hauser Gmbh + Co. Kg | Capacitive differential pressure sensor and method for its manufacture |
CN105222931B (en) * | 2014-06-25 | 2019-02-19 | 香港科技大学 | MEMS capacitive pressure sensor and its manufacturing method |
HUE042666T2 (en) * | 2014-10-17 | 2019-07-29 | Grieshaber Vega Kg | Method for determining a pressure measurement signal and corresponding pressure gage |
CN105333938B (en) * | 2015-11-30 | 2018-12-14 | 蚌埠大洋传感系统工程有限公司 | A kind of hydraulic weighing sensor of condenser type |
EP3173760A1 (en) * | 2015-11-30 | 2017-05-31 | VEGA Grieshaber KG | Relative pressure sensor |
US10732056B2 (en) | 2016-06-09 | 2020-08-04 | Tri-Force Management Corporation | Force sensor |
DE102016124752A1 (en) * | 2016-12-19 | 2018-06-21 | Endress+Hauser SE+Co. KG | Capacitive pressure sensor |
CN108593198A (en) * | 2018-04-23 | 2018-09-28 | 武汉华星光电技术有限公司 | Capacitance diaphragm gauge and dry etching apparatus chamber pressure test system |
DE102018222712A1 (en) * | 2018-12-21 | 2020-06-25 | Robert Bosch Gmbh | Micromechanical component for a capacitive pressure sensor device |
CN110044537A (en) * | 2019-03-27 | 2019-07-23 | 西人马联合测控(泉州)科技有限公司 | Pressure sensor and its manufacturing method |
CN110715757A (en) * | 2019-11-05 | 2020-01-21 | 中国计量大学 | Capacitive pressure sensor based on carbonized cotton fabric film electrode |
CN114279622A (en) * | 2021-11-30 | 2022-04-05 | 浙江中控技术股份有限公司 | Differential pressure sensor |
CN117213668A (en) * | 2023-09-19 | 2023-12-12 | 湖南大学 | Ceramic capacitive pressure sensor and manufacturing method thereof |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1259600B (en) * | 1960-07-01 | 1968-01-25 | Onera (Off Nat Aerospatiale) | Device for measuring the pressure by means of a membrane forming one layer of an electrical capacitor and a method for partially manufacturing the device |
FR2614986B1 (en) * | 1987-05-07 | 1989-08-18 | Otic Fischer & Porter | CAPACITIVE CELL STRUCTURE FOR MEASURING DIFFERENTIAL PRESSURES |
CN87209178U (en) * | 1987-06-17 | 1987-12-30 | 天津大学 | High temp.-resistant and vibration-proof capacitance pressure transducer |
DE3909185A1 (en) * | 1989-03-21 | 1990-09-27 | Endress Hauser Gmbh Co | CAPACITIVE PRESSURE SENSOR AND METHOD FOR THE PRODUCTION THEREOF |
US4972717A (en) * | 1989-09-18 | 1990-11-27 | Texas Instruments Incorporated | Pressure transducer apparatus and method for making same |
CN1020526C (en) * | 1990-07-19 | 1993-05-05 | 涂相征 | Silicon film capacitor pressure sensor and its making method |
US5381299A (en) * | 1994-01-28 | 1995-01-10 | United Technologies Corporation | Capacitive pressure sensor having a substrate with a curved mesa |
ATE203326T1 (en) * | 1998-12-14 | 2001-08-15 | Endress Hauser Gmbh Co | CAPACITIVE PRESSURE OR DIFFERENTIAL PRESSURE MEASUREMENT CELLS AND METHOD FOR THE PRODUCTION THEREOF |
DE10036433A1 (en) * | 2000-07-26 | 2002-02-07 | Endress Hauser Gmbh Co | Capacitive pressure sensor has membrane connected to base body via joint and groove to measurement capacitor connects to end of joint in base body |
-
2002
- 2002-07-31 DE DE10235046A patent/DE10235046A1/en not_active Withdrawn
-
2003
- 2003-07-18 EP EP03766225A patent/EP1537395B1/en not_active Expired - Lifetime
- 2003-07-18 AT AT03766225T patent/ATE319984T1/en not_active IP Right Cessation
- 2003-07-18 WO PCT/EP2003/007843 patent/WO2004013593A1/en not_active Application Discontinuation
- 2003-07-18 AU AU2003250104A patent/AU2003250104A1/en not_active Abandoned
- 2003-07-18 CN CNB038182777A patent/CN100353153C/en not_active Expired - Fee Related
- 2003-07-18 DE DE50302624T patent/DE50302624D1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1537395B1 (en) | 2006-03-08 |
WO2004013593A1 (en) | 2004-02-12 |
DE50302624D1 (en) | 2006-05-04 |
EP1537395A1 (en) | 2005-06-08 |
ATE319984T1 (en) | 2006-03-15 |
DE10235046A1 (en) | 2004-02-12 |
CN100353153C (en) | 2007-12-05 |
CN1672023A (en) | 2005-09-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |