AU2003247250A1 - Method and device for calibrating a feeler device - Google Patents
Method and device for calibrating a feeler deviceInfo
- Publication number
- AU2003247250A1 AU2003247250A1 AU2003247250A AU2003247250A AU2003247250A1 AU 2003247250 A1 AU2003247250 A1 AU 2003247250A1 AU 2003247250 A AU2003247250 A AU 2003247250A AU 2003247250 A AU2003247250 A AU 2003247250A AU 2003247250 A1 AU2003247250 A1 AU 2003247250A1
- Authority
- AU
- Australia
- Prior art keywords
- calibrating
- feeler
- feeler device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10233369.6 | 2002-07-23 | ||
DE2002133369 DE10233369A1 (en) | 2002-07-23 | 2002-07-23 | Test instrument calibration method employs a measurement length standard in the form of a silicon strip with grooves in its surface, with calibration carried out with the strip in two different inclinations |
PCT/DE2003/002219 WO2004017018A1 (en) | 2002-07-23 | 2003-07-03 | Method and device for calibrating a feeler device |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2003247250A1 true AU2003247250A1 (en) | 2004-03-03 |
Family
ID=30128266
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2003247250A Abandoned AU2003247250A1 (en) | 2002-07-23 | 2003-07-03 | Method and device for calibrating a feeler device |
Country Status (3)
Country | Link |
---|---|
AU (1) | AU2003247250A1 (en) |
DE (1) | DE10233369A1 (en) |
WO (1) | WO2004017018A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110196005B (en) * | 2019-06-14 | 2021-01-26 | 苏州热工研究院有限公司 | Calibration device and method for nuclear power radioactive vernier measuring tool |
DE102021128281A1 (en) | 2021-10-29 | 2023-05-04 | Afm Technology Gmbh | CALIBRATING BODY AND METHOD OF CALIBRATION OF A COORDINATE MEASURING DEVICE |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE7603196U1 (en) * | 1900-01-01 | Hommelwerke Gmbh, 7220 Schwenningen | ||
JPH0419461Y2 (en) * | 1987-04-06 | 1992-05-01 | ||
JPH0830743B2 (en) * | 1991-03-07 | 1996-03-27 | 株式会社ミツトヨ | Leveling device |
JP2919119B2 (en) * | 1991-06-05 | 1999-07-12 | キヤノン株式会社 | Scanning probe microscope and recording / reproducing device |
JPH08233836A (en) * | 1995-02-28 | 1996-09-13 | Hitachi Constr Mach Co Ltd | Scanning probe microscope, standard device for calibrating height direction thereof and calibration method |
DE19651029C2 (en) * | 1996-12-09 | 1999-12-02 | Ibm | Calibration standard for profilometers and manufacturing processes |
-
2002
- 2002-07-23 DE DE2002133369 patent/DE10233369A1/en not_active Ceased
-
2003
- 2003-07-03 WO PCT/DE2003/002219 patent/WO2004017018A1/en not_active Application Discontinuation
- 2003-07-03 AU AU2003247250A patent/AU2003247250A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO2004017018A1 (en) | 2004-02-26 |
DE10233369A1 (en) | 2004-02-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |