AU2003247250A1 - Method and device for calibrating a feeler device - Google Patents

Method and device for calibrating a feeler device

Info

Publication number
AU2003247250A1
AU2003247250A1 AU2003247250A AU2003247250A AU2003247250A1 AU 2003247250 A1 AU2003247250 A1 AU 2003247250A1 AU 2003247250 A AU2003247250 A AU 2003247250A AU 2003247250 A AU2003247250 A AU 2003247250A AU 2003247250 A1 AU2003247250 A1 AU 2003247250A1
Authority
AU
Australia
Prior art keywords
calibrating
feeler
feeler device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003247250A
Inventor
Andreas Beutler
Joseph Lemoine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Mahr Holding GmbH
Original Assignee
Carl Mahr Holding GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Mahr Holding GmbH filed Critical Carl Mahr Holding GmbH
Publication of AU2003247250A1 publication Critical patent/AU2003247250A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042Calibration or calibration artifacts

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
AU2003247250A 2002-07-23 2003-07-03 Method and device for calibrating a feeler device Abandoned AU2003247250A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10233369.6 2002-07-23
DE2002133369 DE10233369A1 (en) 2002-07-23 2002-07-23 Test instrument calibration method employs a measurement length standard in the form of a silicon strip with grooves in its surface, with calibration carried out with the strip in two different inclinations
PCT/DE2003/002219 WO2004017018A1 (en) 2002-07-23 2003-07-03 Method and device for calibrating a feeler device

Publications (1)

Publication Number Publication Date
AU2003247250A1 true AU2003247250A1 (en) 2004-03-03

Family

ID=30128266

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003247250A Abandoned AU2003247250A1 (en) 2002-07-23 2003-07-03 Method and device for calibrating a feeler device

Country Status (3)

Country Link
AU (1) AU2003247250A1 (en)
DE (1) DE10233369A1 (en)
WO (1) WO2004017018A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110196005B (en) * 2019-06-14 2021-01-26 苏州热工研究院有限公司 Calibration device and method for nuclear power radioactive vernier measuring tool
DE102021128281A1 (en) 2021-10-29 2023-05-04 Afm Technology Gmbh CALIBRATING BODY AND METHOD OF CALIBRATION OF A COORDINATE MEASURING DEVICE

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE7603196U1 (en) * 1900-01-01 Hommelwerke Gmbh, 7220 Schwenningen
JPH0419461Y2 (en) * 1987-04-06 1992-05-01
JPH0830743B2 (en) * 1991-03-07 1996-03-27 株式会社ミツトヨ Leveling device
JP2919119B2 (en) * 1991-06-05 1999-07-12 キヤノン株式会社 Scanning probe microscope and recording / reproducing device
JPH08233836A (en) * 1995-02-28 1996-09-13 Hitachi Constr Mach Co Ltd Scanning probe microscope, standard device for calibrating height direction thereof and calibration method
DE19651029C2 (en) * 1996-12-09 1999-12-02 Ibm Calibration standard for profilometers and manufacturing processes

Also Published As

Publication number Publication date
WO2004017018A1 (en) 2004-02-26
DE10233369A1 (en) 2004-02-12

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase