AU2003221959A1 - Single crystal silicon membranes for microelectromechanical applications - Google Patents

Single crystal silicon membranes for microelectromechanical applications

Info

Publication number
AU2003221959A1
AU2003221959A1 AU2003221959A AU2003221959A AU2003221959A1 AU 2003221959 A1 AU2003221959 A1 AU 2003221959A1 AU 2003221959 A AU2003221959 A AU 2003221959A AU 2003221959 A AU2003221959 A AU 2003221959A AU 2003221959 A1 AU2003221959 A1 AU 2003221959A1
Authority
AU
Australia
Prior art keywords
single crystal
crystal silicon
silicon membranes
microelectromechanical applications
microelectromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003221959A
Inventor
Kevin S. Jones
Mark E. Law
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Florida
Original Assignee
University of Florida
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Florida filed Critical University of Florida
Publication of AU2003221959A1 publication Critical patent/AU2003221959A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0315—Cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0111—Bulk micromachining
    • B81C2201/0116—Thermal treatment for structural rearrangement of substrate atoms, e.g. for making buried cavities

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
AU2003221959A 2002-04-15 2003-04-15 Single crystal silicon membranes for microelectromechanical applications Abandoned AU2003221959A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US37265102P 2002-04-15 2002-04-15
US60/372,651 2002-04-15
PCT/US2003/011720 WO2003090281A2 (en) 2002-04-15 2003-04-15 Single crystal silicon membranes for microelectromechanical applications

Publications (1)

Publication Number Publication Date
AU2003221959A1 true AU2003221959A1 (en) 2003-11-03

Family

ID=29250887

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003221959A Abandoned AU2003221959A1 (en) 2002-04-15 2003-04-15 Single crystal silicon membranes for microelectromechanical applications

Country Status (2)

Country Link
AU (1) AU2003221959A1 (en)
WO (1) WO2003090281A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100722687B1 (en) 2006-05-09 2007-05-30 주식회사 비에스이 Directional silicon condenser microphone having additional back chamber
KR100722686B1 (en) 2006-05-09 2007-05-30 주식회사 비에스이 Silicon condenser microphone having additional back chamber and sound hole in pcb
CN103935953B (en) * 2014-04-25 2016-04-13 上海先进半导体制造股份有限公司 Composite cavity and forming method thereof

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19527314A1 (en) * 1994-08-16 1996-02-22 Ims Ionen Mikrofab Syst Fabrication of silicon membrane with predefined parameters
US5963788A (en) * 1995-09-06 1999-10-05 Sandia Corporation Method for integrating microelectromechanical devices with electronic circuitry
IL116536A0 (en) * 1995-12-24 1996-03-31 Harunian Dan Direct integration of sensing mechanisms with single crystal based micro-electric-mechanics systems
US6355498B1 (en) * 2000-08-11 2002-03-12 Agere Systems Guartian Corp. Thin film resonators fabricated on membranes created by front side releasing

Also Published As

Publication number Publication date
WO2003090281A2 (en) 2003-10-30
WO2003090281A3 (en) 2004-01-08

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase