AU2002953360A0 - Polishing pad cleaner - Google Patents
Polishing pad cleanerInfo
- Publication number
- AU2002953360A0 AU2002953360A0 AU2002953360A AU2002953360A AU2002953360A0 AU 2002953360 A0 AU2002953360 A0 AU 2002953360A0 AU 2002953360 A AU2002953360 A AU 2002953360A AU 2002953360 A AU2002953360 A AU 2002953360A AU 2002953360 A0 AU2002953360 A0 AU 2002953360A0
- Authority
- AU
- Australia
- Prior art keywords
- polishing pad
- pad cleaner
- cleaner
- polishing
- pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2002953360A AU2002953360A0 (en) | 2002-11-27 | 2002-11-27 | Polishing pad cleaner |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2002953360A AU2002953360A0 (en) | 2002-11-27 | 2002-11-27 | Polishing pad cleaner |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2002953360A0 true AU2002953360A0 (en) | 2003-01-09 |
Family
ID=30004445
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2002953360A Abandoned AU2002953360A0 (en) | 2002-11-27 | 2002-11-27 | Polishing pad cleaner |
Country Status (1)
Country | Link |
---|---|
AU (1) | AU2002953360A0 (en) |
-
2002
- 2002-11-27 AU AU2002953360A patent/AU2002953360A0/en not_active Abandoned
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