AU2002953360A0 - Polishing pad cleaner - Google Patents

Polishing pad cleaner

Info

Publication number
AU2002953360A0
AU2002953360A0 AU2002953360A AU2002953360A AU2002953360A0 AU 2002953360 A0 AU2002953360 A0 AU 2002953360A0 AU 2002953360 A AU2002953360 A AU 2002953360A AU 2002953360 A AU2002953360 A AU 2002953360A AU 2002953360 A0 AU2002953360 A0 AU 2002953360A0
Authority
AU
Australia
Prior art keywords
polishing pad
pad cleaner
cleaner
polishing
pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002953360A
Inventor
Ricky Darren Woodward
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Woodward Ricky Darren Mr
Original Assignee
Woodward Ricky Darren Mr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Woodward Ricky Darren Mr filed Critical Woodward Ricky Darren Mr
Priority to AU2002953360A priority Critical patent/AU2002953360A0/en
Publication of AU2002953360A0 publication Critical patent/AU2002953360A0/en
Abandoned legal-status Critical Current

Links

AU2002953360A 2002-11-27 2002-11-27 Polishing pad cleaner Abandoned AU2002953360A0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002953360A AU2002953360A0 (en) 2002-11-27 2002-11-27 Polishing pad cleaner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AU2002953360A AU2002953360A0 (en) 2002-11-27 2002-11-27 Polishing pad cleaner

Publications (1)

Publication Number Publication Date
AU2002953360A0 true AU2002953360A0 (en) 2003-01-09

Family

ID=30004445

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002953360A Abandoned AU2002953360A0 (en) 2002-11-27 2002-11-27 Polishing pad cleaner

Country Status (1)

Country Link
AU (1) AU2002953360A0 (en)

Similar Documents

Publication Publication Date Title
AU2002360661A1 (en) Polishing pad
AU2003228036A1 (en) Microporous polishing pad
AU2003272674A1 (en) Polishing pad for planarization
AU2003217521A1 (en) Polishing machine
AU2003254878A1 (en) Cleansing pad
AU2003215261A1 (en) Polishing composition
AU2003239340A1 (en) Nonwoven composite cleaning pad
AU2003281267A1 (en) Soft between-teeth cleaner
AUPS236102A0 (en) Grinder
SG111222A1 (en) Polishing pad
TWI317757B (en) Polishing composition
PL376253A1 (en) Thickened abrasive cleaner
GB2397580B (en) Polishing composition
GB2393447B (en) Polishing composition
GB2397579B (en) Polishing composition
GB2390370B (en) Polishing composition
GB2393186B (en) Polishing composition
AU2003286887A1 (en) Cleaning pads
AU2001278101A1 (en) Abrasive pad
AU2003275653A1 (en) Polishing apparatus
GB2395486B (en) Polishing composition
AU2003242400A1 (en) Polisher
AU2003291153A1 (en) Contour following end effectors for lapping/polishing
AU2003252687A1 (en) Polishing device
AU2002953360A0 (en) Polishing pad cleaner