AU2002362847A1 - Method and device for monitoring a cvd process - Google Patents

Method and device for monitoring a cvd process

Info

Publication number
AU2002362847A1
AU2002362847A1 AU2002362847A AU2002362847A AU2002362847A1 AU 2002362847 A1 AU2002362847 A1 AU 2002362847A1 AU 2002362847 A AU2002362847 A AU 2002362847A AU 2002362847 A AU2002362847 A AU 2002362847A AU 2002362847 A1 AU2002362847 A1 AU 2002362847A1
Authority
AU
Australia
Prior art keywords
monitoring
cvd process
cvd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002362847A
Inventor
Matthias Bode
Michael Heuken
Michael Pfeil
Jurgen Schmitt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aixtron SE
Original Assignee
Aixtron SE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aixtron SE filed Critical Aixtron SE
Publication of AU2002362847A1 publication Critical patent/AU2002362847A1/en
Abandoned legal-status Critical Current

Links

AU2002362847A 2001-10-17 2002-10-02 Method and device for monitoring a cvd process Abandoned AU2002362847A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10151259.7 2001-10-17

Publications (1)

Publication Number Publication Date
AU2002362847A1 true AU2002362847A1 (en) 2003-04-28

Family

ID=

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