AU2002352701A1 - Electropolishing assembly and methods for electropolishing conductive layers - Google Patents

Electropolishing assembly and methods for electropolishing conductive layers

Info

Publication number
AU2002352701A1
AU2002352701A1 AU2002352701A AU2002352701A AU2002352701A1 AU 2002352701 A1 AU2002352701 A1 AU 2002352701A1 AU 2002352701 A AU2002352701 A AU 2002352701A AU 2002352701 A AU2002352701 A AU 2002352701A AU 2002352701 A1 AU2002352701 A1 AU 2002352701A1
Authority
AU
Australia
Prior art keywords
electropolishing
methods
conductive layers
assembly
electropolishing assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002352701A
Inventor
Muhammed Afnan
Felix Gutman
Voha Nuch
Hui Wang
Peihau Yih
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ACM Research Inc
Original Assignee
ACM Research Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ACM Research Inc filed Critical ACM Research Inc
Publication of AU2002352701A1 publication Critical patent/AU2002352701A1/en
Abandoned legal-status Critical Current

Links

AU2002352701A 2001-11-13 2002-11-13 Electropolishing assembly and methods for electropolishing conductive layers Abandoned AU2002352701A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US60/332,417 2001-11-13
US60/372,567 2002-04-14

Publications (1)

Publication Number Publication Date
AU2002352701A1 true AU2002352701A1 (en) 2003-05-26

Family

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