AU2002343866A1 - Agent for forming coating for narrowing pattern and method for forming fine pattern using the same - Google Patents

Agent for forming coating for narrowing pattern and method for forming fine pattern using the same

Info

Publication number
AU2002343866A1
AU2002343866A1 AU2002343866A AU2002343866A AU2002343866A1 AU 2002343866 A1 AU2002343866 A1 AU 2002343866A1 AU 2002343866 A AU2002343866 A AU 2002343866A AU 2002343866 A AU2002343866 A AU 2002343866A AU 2002343866 A1 AU2002343866 A1 AU 2002343866A1
Authority
AU
Australia
Prior art keywords
pattern
forming
agent
same
narrowing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002343866A
Inventor
Fumitake Kaneko
Yoshiki Sugeta
Toshikazu Tachikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of AU2002343866A1 publication Critical patent/AU2002343866A1/en
Abandoned legal-status Critical Current

Links

AU2002343866A 2001-11-05 2002-11-05 Agent for forming coating for narrowing pattern and method for forming fine pattern using the same Abandoned AU2002343866A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-339309 2001-11-05
JP2002-080517 2002-03-22

Publications (1)

Publication Number Publication Date
AU2002343866A1 true AU2002343866A1 (en) 2003-05-19

Family

ID=

Similar Documents

Publication Publication Date Title
EP1452923A4 (en) Agent for forming coating for narrowing pattern and method for forming fine pattern using the same
AU2002354248A1 (en) Positive resist composition and method of forming resist pattern from the same
AU2001277061A1 (en) Method and apparatus for fine feature spray deposition
AU2002226083A1 (en) Non-skid coating and method of forming the same
AU2001297751A1 (en) Coatings for modifying hard surfaces and processes for applying the same
AU2002364965A1 (en) Method and composition for coating mat and articles produced therewith
AU2001277191A1 (en) Coating apparatus and method
AU2002235281A1 (en) Inverse resist coating process
AU2002360993A1 (en) Method for coating objects
AU2002362248A1 (en) Spray member and method for using the same
GB2381482B (en) Coating for different substrates and processes for making same.
AU2000276782A1 (en) Spray-spin coating method
EP1182271B8 (en) Apparatus and method for coating substrate
AU2001236102A1 (en) Chromium-containing metal and method for producing the same
AU2002315025A1 (en) Retroreflective coating system and method for producing the same
HK1071524A1 (en) Coated tablets and process for producing the same
AU2001244284A1 (en) Particle coating method
AU2001295638A1 (en) Coating method and coating apparatus
AU2002343866A1 (en) Agent for forming coating for narrowing pattern and method for forming fine pattern using the same
AU2002352120A1 (en) Coating method
AU2002367167A1 (en) A coating composition and method for preparing and applying the same
AU2001256473A1 (en) Coating process
AU2001292359A1 (en) Chemically modified substrate and process for producing the same
GB2415356B (en) Coating process
AUPQ549000A0 (en) Coating method