AU2002343790A1 - Process for producing silicon carbide sinter jig for use in semiconductor production and silicon carbide sinter jig obtained by the process - Google Patents

Process for producing silicon carbide sinter jig for use in semiconductor production and silicon carbide sinter jig obtained by the process

Info

Publication number
AU2002343790A1
AU2002343790A1 AU2002343790A AU2002343790A AU2002343790A1 AU 2002343790 A1 AU2002343790 A1 AU 2002343790A1 AU 2002343790 A AU2002343790 A AU 2002343790A AU 2002343790 A AU2002343790 A AU 2002343790A AU 2002343790 A1 AU2002343790 A1 AU 2002343790A1
Authority
AU
Australia
Prior art keywords
silicon carbide
jig
carbide sinter
sinter
semiconductor production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002343790A
Inventor
Fumio Odaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bridgestone Corp
Original Assignee
Bridgestone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bridgestone Corp filed Critical Bridgestone Corp
Publication of AU2002343790A1 publication Critical patent/AU2002343790A1/en
Abandoned legal-status Critical Current

Links

AU2002343790A 2001-11-08 2002-10-30 Process for producing silicon carbide sinter jig for use in semiconductor production and silicon carbide sinter jig obtained by the process Abandoned AU2002343790A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001-343427 2001-11-08

Publications (1)

Publication Number Publication Date
AU2002343790A1 true AU2002343790A1 (en) 2003-05-19

Family

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