AU2002341533A1 - Thin film deposition by laser irradiation - Google Patents

Thin film deposition by laser irradiation

Info

Publication number
AU2002341533A1
AU2002341533A1 AU2002341533A AU2002341533A AU2002341533A1 AU 2002341533 A1 AU2002341533 A1 AU 2002341533A1 AU 2002341533 A AU2002341533 A AU 2002341533A AU 2002341533 A AU2002341533 A AU 2002341533A AU 2002341533 A1 AU2002341533 A1 AU 2002341533A1
Authority
AU
Australia
Prior art keywords
thin film
laser irradiation
film deposition
deposition
irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002341533A
Inventor
Ming Hui Hong
Dongjiang Wu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Data Storage Institute
Original Assignee
Data Storage Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Data Storage Institute filed Critical Data Storage Institute
Publication of AU2002341533A1 publication Critical patent/AU2002341533A1/en
Abandoned legal-status Critical Current

Links

AU2002341533A 2001-10-16 2002-10-16 Thin film deposition by laser irradiation Abandoned AU2002341533A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SG200106342-9 2001-10-16
SG200202589-8 2002-04-30

Publications (1)

Publication Number Publication Date
AU2002341533A1 true AU2002341533A1 (en) 2003-05-19

Family

ID=

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