AU2002336301A1 - Polishing compound, method for production thereof and polishing method - Google Patents

Polishing compound, method for production thereof and polishing method

Info

Publication number
AU2002336301A1
AU2002336301A1 AU2002336301A AU2002336301A AU2002336301A1 AU 2002336301 A1 AU2002336301 A1 AU 2002336301A1 AU 2002336301 A AU2002336301 A AU 2002336301A AU 2002336301 A AU2002336301 A AU 2002336301A AU 2002336301 A1 AU2002336301 A1 AU 2002336301A1
Authority
AU
Australia
Prior art keywords
polishing
production
compound
polishing compound
polishing method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002336301A
Inventor
Yoshinori Kon
Norihito Nakazawa
Satoshi Takemiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seimi Chemical Co Ltd
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Seimi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd, Seimi Chemical Co Ltd filed Critical Asahi Glass Co Ltd
Publication of AU2002336301A1 publication Critical patent/AU2002336301A1/en
Abandoned legal-status Critical Current

Links

AU2002336301A 2001-10-26 2002-10-23 Polishing compound, method for production thereof and polishing method Abandoned AU2002336301A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-329148 2001-10-26
JP2001-353207 2001-11-19

Publications (1)

Publication Number Publication Date
AU2002336301A1 true AU2002336301A1 (en) 2003-05-06

Family

ID=

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