AU2002334642A1 - Phospono compound-containing polishing composition and method of using same - Google Patents

Phospono compound-containing polishing composition and method of using same

Info

Publication number
AU2002334642A1
AU2002334642A1 AU2002334642A AU2002334642A AU2002334642A1 AU 2002334642 A1 AU2002334642 A1 AU 2002334642A1 AU 2002334642 A AU2002334642 A AU 2002334642A AU 2002334642 A AU2002334642 A AU 2002334642A AU 2002334642 A1 AU2002334642 A1 AU 2002334642A1
Authority
AU
Australia
Prior art keywords
phospono
compound
same
polishing composition
containing polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002334642A
Inventor
Mingming Fang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CMC Materials Inc
Original Assignee
Cabot Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cabot Microelectronics Corp filed Critical Cabot Microelectronics Corp
Publication of AU2002334642A1 publication Critical patent/AU2002334642A1/en
Abandoned legal-status Critical Current

Links

AU2002334642A 2001-10-11 2002-09-20 Phospono compound-containing polishing composition and method of using same Abandoned AU2002334642A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/975,335 2001-10-11

Publications (1)

Publication Number Publication Date
AU2002334642A1 true AU2002334642A1 (en) 2003-04-22

Family

ID=

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