AU2002332643A1 - In-situ balancing for phase-shifting mask - Google Patents

In-situ balancing for phase-shifting mask

Info

Publication number
AU2002332643A1
AU2002332643A1 AU2002332643A AU2002332643A AU2002332643A1 AU 2002332643 A1 AU2002332643 A1 AU 2002332643A1 AU 2002332643 A AU2002332643 A AU 2002332643A AU 2002332643 A AU2002332643 A AU 2002332643A AU 2002332643 A1 AU2002332643 A1 AU 2002332643A1
Authority
AU
Australia
Prior art keywords
phase
shifting mask
situ balancing
balancing
situ
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002332643A
Inventor
Giang Dao
Qi-De Qian
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intel Corp
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Publication of AU2002332643A1 publication Critical patent/AU2002332643A1/en
Abandoned legal-status Critical Current

Links

AU2002332643A 2001-09-19 2002-08-22 In-situ balancing for phase-shifting mask Abandoned AU2002332643A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/957,571 2001-09-19

Publications (1)

Publication Number Publication Date
AU2002332643A1 true AU2002332643A1 (en) 2003-04-01

Family

ID=

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