AU2002330826A1 - Gate electrodes and the formation thereof - Google Patents

Gate electrodes and the formation thereof

Info

Publication number
AU2002330826A1
AU2002330826A1 AU2002330826A AU2002330826A AU2002330826A1 AU 2002330826 A1 AU2002330826 A1 AU 2002330826A1 AU 2002330826 A AU2002330826 A AU 2002330826A AU 2002330826 A AU2002330826 A AU 2002330826A AU 2002330826 A1 AU2002330826 A1 AU 2002330826A1
Authority
AU
Australia
Prior art keywords
formation
gate electrodes
electrodes
gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002330826A
Inventor
Dongzhi Chi
Syamal Kumar Lahiri
Dominique Mangelinck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institute of Materials Research and Engineering
Original Assignee
Institute of Materials Research and Engineering
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institute of Materials Research and Engineering filed Critical Institute of Materials Research and Engineering
Publication of AU2002330826A1 publication Critical patent/AU2002330826A1/en
Abandoned legal-status Critical Current

Links

AU2002330826A 2001-07-31 2002-07-31 Gate electrodes and the formation thereof Abandoned AU2002330826A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG0104614-3 2001-07-31

Publications (1)

Publication Number Publication Date
AU2002330826A1 true AU2002330826A1 (en) 2003-02-17

Family

ID=

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