AU2002329588A1 - Smif load port interface including smart port door - Google Patents

Smif load port interface including smart port door

Info

Publication number
AU2002329588A1
AU2002329588A1 AU2002329588A AU2002329588A AU2002329588A1 AU 2002329588 A1 AU2002329588 A1 AU 2002329588A1 AU 2002329588 A AU2002329588 A AU 2002329588A AU 2002329588 A AU2002329588 A AU 2002329588A AU 2002329588 A1 AU2002329588 A1 AU 2002329588A1
Authority
AU
Australia
Prior art keywords
interface including
including smart
door
port
smif
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002329588A
Inventor
Frederick T. Rosenquist
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asyst Technologies Inc
Original Assignee
Asyst Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asyst Technologies Inc filed Critical Asyst Technologies Inc
Publication of AU2002329588A1 publication Critical patent/AU2002329588A1/en
Abandoned legal-status Critical Current

Links

AU2002329588A 2001-07-13 2002-07-10 Smif load port interface including smart port door Abandoned AU2002329588A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/905,339 2001-07-13

Publications (1)

Publication Number Publication Date
AU2002329588A1 true AU2002329588A1 (en) 2003-01-29

Family

ID=

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