AU2002328892A1 - Mask and method for producing a mask - Google Patents

Mask and method for producing a mask

Info

Publication number
AU2002328892A1
AU2002328892A1 AU2002328892A AU2002328892A AU2002328892A1 AU 2002328892 A1 AU2002328892 A1 AU 2002328892A1 AU 2002328892 A AU2002328892 A AU 2002328892A AU 2002328892 A AU2002328892 A AU 2002328892A AU 2002328892 A1 AU2002328892 A1 AU 2002328892A1
Authority
AU
Australia
Prior art keywords
mask
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002328892A
Inventor
Thomas Bayer
Johann Greschner
Samuel Kalt
Helga Weiss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TEAM NANOTEC GmbH
Original Assignee
TEAM NANOTEC GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TEAM NANOTEC GmbH filed Critical TEAM NANOTEC GmbH
Publication of AU2002328892A1 publication Critical patent/AU2002328892A1/en
Abandoned legal-status Critical Current

Links

AU2002328892A 2001-08-02 2002-07-13 Mask and method for producing a mask Abandoned AU2002328892A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10137834.3 2001-08-02

Publications (1)

Publication Number Publication Date
AU2002328892A1 true AU2002328892A1 (en) 2003-02-24

Family

ID=

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